A Study on Precision Stage with Displacement Magnification Mechanism Using  Flexure-Based Levers

Bae, Gyu-Hyun; Hong, Seong-Wook; Lee, Deug-Woo

doi:10.19026/rjaset.7.520

Cited by 2 publications

(1 citation statement)

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“…Yamauchi [ 14 ] described a device for measuring rock deformation in a drilling tube applying a single stage lever mechanism. Bae et al [ 15 ] described a piezoelectric actuator driven micro-stage with a build-in magnifying mechanism for displacement measurement. The magnifying mechanism was a two-stage lever system with monolithic hinges all made in a piece of metal slab and had a magnification ratio of 30.…”

Section: Introductionmentioning

confidence: 99%

Precision Low-Cost Compact Micro-Displacement Sensors Based on a New Arrangement of Cascaded Levers with Flexural Joints

Tsao

Tseng

Chen

et al. 2022

Sensors

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Existing displacement sensors of micrometers to sub-micron precision are expensive and have various limitations. This paper reports the design and development of a new contact type compact micro-displacement sensor of sub-micron precision for a fraction of the cost of commercial devices. The basic concept of the new sensor system applies a mechanical magnifying mechanism to magnify a displacement at sub-micron to micron level and uses a low-cost Hall sensor to measure the magnified displacement. Various conceptual designs for the mechanical magnifying mechanism based on cascaded levers with flexural joints were studied and a final design, featuring side-by-side placement of lever structures in a multi-planar layout with adjacent levers coupled by L-shaped coupling foils, was devised. Prototypes of two different sizes and constructions with mechanical magnification ratios over 100 were made and tested. Measurement repeatability and accuracy to sub-micrometer level and a resolution down to hundredths of a micrometer were demonstrated by a compact Alpha Model prototype. Design modification of parts and a corresponding small lot size production procedure were devised to provide an estimated bill of material cost per unit under US$100.

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Section: Introductionmentioning

confidence: 99%