A Study on Structural Parameters for Optimizing Wide-Band Property of Diaphragm-Type Transducer Using Piezoelectric Thick Film

Ishiguro, Yuya; Suzuki, Masatoshi; Tagawa, Norio; Yoshizawa, Masasumi; Irie, Takasuke

doi:10.1109/ultsym.2018.8580091

Cited by 1 publication

(1 citation statement)

References 8 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…A wideband thickness vibration therefore becomes dominant when the thickness of the PZT layer increases. [26][27][28][29][30] The previous results have been discussed focusing on characteristics in the frequency domain, aiming to achieve both higher sensitivity and a wider bandwidth. However, previous studies have not sufficiently addressed time waveforms, and there are concerns that the waveforms have inappropriate characteristics for imaging.…”

Section: Introductionmentioning

confidence: 99%

Effects of flexural vibration and thickness vibration on receiving characteristics of a diaphragm-type PZT resonator

Suzuki

Tagawa

Yoshizawa

et al. 2020

Jpn. J. Appl. Phys.

Self Cite

View full text Add to dashboard Cite

The piezoelectric micromachined ultrasonic transducer (PMUT) is increasingly being used in medical applications with the development of microelectromechanical system technology. The PMUT generates flexural vibration depending on its structure, but there is also thickness vibration depending on the film thickness of the resonator. This paper clarifies the effect of each vibration on the PMUT reception characteristics. Two approaches that may weaken flexural vibration are investigated in finite element simulation. One is thickening the support layer to increase the damping function. The other is increasing the thickness vibration by thickening the lead zirconate titanate (PZT) layer. Results reveal that flexural vibration is strongly related to ringing in the received waveform, owing to flexural vibration generating rapid phase changes in the frequency domain. Meanwhile, thickness vibration, the degree of which depends on the thickness of the PZT layer, is confirmed to affect the pulse width but be less relevant to ringing.

show abstract