2010
DOI: 10.5012/bkcs.2010.31.04.891
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A Study on the Development of CVD Precursors VI-Thermal Properties of Co(III) β-Diketonates

Abstract: Thermal properties of a series of Co β-diketonates have been systematically investigated and it is found that tris(3,5-heptanedionato) cobalt(III) (Co(hd)3) with the lowest melting point among them can be a better precursor than tris(2,2,6,6-tetramethyl-3,5-heptanedionato cobalt(III) (Co(tmhd)3), one of the most popular precursors to date, under suitable conditions. Isothermal TGA study shows that Co(hd)3 would work better at higher temperature, while Co(dmhd)3 would be a better precursor at lower temperature.

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Cited by 7 publications
(2 citation statements)
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“…(Co(dmp) 3 ,!Strem!Chemicals)! [26].!It!is! used!as!a!0.02!M!solution!in!anhydrous!toluene!(99.8%!Sigma-Aldrich)!…”
Section: Film!deposition!mentioning
confidence: 99%
“…(Co(dmp) 3 ,!Strem!Chemicals)! [26].!It!is! used!as!a!0.02!M!solution!in!anhydrous!toluene!(99.8%!Sigma-Aldrich)!…”
Section: Film!deposition!mentioning
confidence: 99%
“…Complexes 1-5 were synthesized using reported methods 49 with minor changes. 32 50 213 °C, 49 220 °C, 219-220 °C, 30 220 °C51 ); IR ῡ (cm −1 ): 1580 (CO); 30,52 NMR (600 MHz, CDCl 3 , 25 °C): δ 6.07 (s, 1H, CH), 6.05 (s, 1H, CH), 6.01 (s, 1H, CH), 2.45 (s, 3H, CH 3 ), 2.44 (s, 3H, CH 3 ), 2.40 (s, 3H, CH 3 ); 13 C NMR (150 MHz, CDCl 3 , 25 °C): δ 199.5 (CO), 199.0 (CO), 198.9 (CO), 170.8 (q, J C-F = 34.6 Hz, CO), 170.6 (q, J C-F = 34.8 Hz, CO), 170.1 (q, J C-F = 34.7 Hz, CO), 114.4 (q, J C-F = 282.7 Hz, CF 3 ), 94 (CH), 94.1 (CH),94.3 (CH), (CH 3 ), 27.7 (CH 3 ), 27.5 (CH 3 ); 19…”
Section: Synthesismentioning
confidence: 99%