A Study on the Optimum Design of the Condenser Lens of a Compact Electrostatic-Type SEM

Abstract

Article history:In this paper, we describe the production of a specific electrostatic-type scanning electron microscope based on miniaturization for application in other types of vacuum equipment. The initial configuration of the SEM starts with a minimal configuration that allows people to view sample images. After improving the stability of the SEM operation and resolution, we conducted experiments on identifying the characteristics and development of an einzel-type condenser lens with reference to the demagnification lens system of an SEM. The experiments were conducted at an acceleration voltage of 5 kV and we found the shape of the lens to be more reliable than a conventional lens. The lens was then added to improve the resolution in the nanometer region. The current measured on the sample was approximately 40 pA and its magnification was 4,000 times. . 이는 시간과 비용의 절약을 극대화하고 전자현미경의 활용 가능성을 더욱 넓히는데 그 목적이 있다. 복합화에서 중요시되는 부분