“…In the literature, there are many investigations of metal oxide coatings on polymers such as polycarbonates (PC), poly(ethylene terephthalate) (PET), poly(methyl methacrylate) (PMMA), polydimethylsiloxane (PDMS), polyimide, poly(propylene) (PP), etc. [4,6,[15][16][17] While in most of these studies, silicon oxide (SiO x ) was deposited on the polymers, aluminum oxide (AlO x ) has received little attention. Yet, AlO x has remained one of the most widely used metal oxides for nonpolymeric surfaces due to its combination of wear resistance, high thermal and chemical stability, and electrical resistivity.…”