A SU-8 fluidic microsystem for biological fluids analysis

Ribeiro, José Carlos Rabelo; Minas, Graça; Turmezei, P.; Wolffenbuttel, R.F.; Correia, J. H.

doi:10.1016/j.sna.2005.03.032

Cited by 43 publications

(26 citation statements)

References 6 publications

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“…In the last few years, SU-8 has been used in a large range of applications, namely, in the fabrication of microchannels for microfluidic and lab-on-a-chip devices [19][20][21][22] and as a structural component in MEMS applications [4,23,24]. Some microstructures, fabricated using the process described in Section 2, for the reported applications are briefly shown below.…”

Section: Applications Of Su-8mentioning

confidence: 99%

Optimized SU-8 Processing for Low-Cost Microstructures Fabrication without Cleanroom Facilities

et al. 2014

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Abstract:The study and optimization of epoxy-based negative photoresist (SU-8) microstructures through a low-cost process and without the need for cleanroom facility is presented in this paper. It is demonstrated that the Ultraviolet Rays (UV) exposure equipment, commonly used in the Printed Circuit Board (PCB) industry, can replace the more expensive and less available equipment, as the Mask Aligner that has been used in the last 15 years for SU-8 patterning. Moreover, high transparency masks, printed in a photomask, are used, instead of expensive chromium masks. The fabrication of well-defined SU-8 microstructures with aspect ratios more than 20 is successfully demonstrated with those facilities. The viability of using the gray-scale technology in the photomasks for the fabrication of 3D microstructures is also reported. Moreover, SU-8 microstructures for different applications are shown throughout the paper.

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Section: Applications Of Su-8mentioning

confidence: 99%

Optimized SU-8 Processing for Low-Cost Microstructures Fabrication without Cleanroom Facilities

et al. 2014

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“…30 Ribeiro et al demonstrated a microfluidic mixer with a channel depth of 600 mm and width of 500 mm in a single SU-8 layer spin-coated on a glass substrate. 31 The inlets and outlets for liquid were drilled in another top glass substrate that was glued on the SU-8 microchannels. Carlier et al fabricated multilayered SU-8 microfluidic channels for electrospray-ionization mass spectroscopy.…”

Section: Microfluidic Structures and Systemsmentioning

confidence: 99%

SU-8 for Microsystem Fabrication

Chiu

Cheng

2014

Photocured Materials

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SU-8 is a negative-tone photoresist that can be used to fabricate thick, high aspect ratio structures. The thickness of SU-8 structures ranges from several micrometers to several hundred micrometers or up to millimeters by direct spin coating or stacking of multiple layers of dry films. Being a negative resist, SU-8 can be used to fabricate complex three-dimensional structures such as sealed microchannels or tilted optical surfaces by multiple exposures. Another feature of SU-8 is that its properties can be controlled and modified during processes by the exposure doses, baking temperature, or even additives. This provides possibilities for novel device design and fabrication without complex fabrication processes. SU-8 has relatively low loss and absorption in the RF and visible spectral ranges, therefore, it has been used to fabricate various sensing, optical, and RF components and systems. This chapter summarizes the basic material properties and fundamental fabrication processes of SU-8. Examples of various structures, actuators, sensors, and fluidic/optical/RF components are presented to demonstrate the wide possibility of devices that can be implemented in SU-8.

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“…SU-8 is highly soluble in many organic solvents, enabling preparation of ultra-thick films (up to 2 mm) that are highly transparent in the near-UV and visible region. SU-8 has been widely used in microelectromechanical systems (MEMS) (Lorenz et al, 1997), microfluidics (Ribeiro et al, 2005), high-aspect ratio (≥20) microstructures (Lee et al, 1994), and 3-D photonic structures (Campbell et al, 2000, Yang et al, 2002, Miklyaev et al, 2003, Moon et al, 2006). Crystalline films made from SU-8 create a colorful reflection due to the diffraction grating of the underlying pattern, which is characteristic of the periodicity (~ 1 μm) and refractive index contrast between high (SU-8, n = 1.6) and low (air, n = 1) dielectric materials, and the viewing angle.…”

Section: Introductionmentioning

confidence: 99%

Color changing photonic crystals detect blast exposure

Cullen

Reneer

et al. 2011

NeuroImage

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Blast-induced traumatic brain injury (bTBI) is the "signature wound" of the current wars in Iraq and Afghanistan. However, with no objective information of relative blast exposure, warfighters with bTBI may not receive appropriate medical care and are at risk of being returned to the battlefield. Accordingly, we have created a colorimetric blast injury dosimeter (BID) that exploits material failure of photonic crystals to detect blast exposure. Appearing like a colored sticker, the BID is fabricated in photosensitive polymers via multi-beam interference lithography. Although very stable in the presence of heat, cold or physical impact, sculpted micro-and nano-structures of the BID are physically altered in a precise manner by blast exposure, resulting in color changes that correspond with blast intensity. This approach offers a lightweight, power-free sensor that can be readily interpreted by the naked eye. Importantly, with future refinement this technology may be deployed to identify soldiers exposed to blast at levels suggested to be supra-threshold for nonimpact blast-induced mild TBI.

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A SU-8 fluidic microsystem for biological fluids analysis

Cited by 43 publications

References 6 publications

Optimized SU-8 Processing for Low-Cost Microstructures Fabrication without Cleanroom Facilities

Optimized SU-8 Processing for Low-Cost Microstructures Fabrication without Cleanroom Facilities

SU-8 for Microsystem Fabrication

Color changing photonic crystals detect blast exposure

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