2009
DOI: 10.1007/s00542-009-0939-6
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A sub-micron metallic electrothermal gripper

Abstract: We report the design, fabrication, and characterization of a multiple bent beam, sub-micron metallic electrothermal gripper. A bottom electroplating mold for electrodes was patterned using electron beam lithography in an SU-8, followed by nickel electroplating. A top electroplating mold for a sub-micron metallic gripper with high aspect ratio bent beams (thickness of 1 lm, width of 350 nm) was prepared using electron beam lithography in a polymethyl methacrylate (PMMA), followed by nickel electroplating and dr… Show more

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Cited by 12 publications
(2 citation statements)
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“…An extensive volume of research has been dedicated to the design and development of carbon nanotube-based electromechanical devices in nanoscale [1][2][3][4][5][6][7][8].…”
Section: Introductionmentioning
confidence: 99%
“…An extensive volume of research has been dedicated to the design and development of carbon nanotube-based electromechanical devices in nanoscale [1][2][3][4][5][6][7][8].…”
Section: Introductionmentioning
confidence: 99%
“…Deflections >100 μm and forces >100 mN can be provided at an energy density higher than of electrostatic actuators. Electrothermal actuators can be fabricated from metal [1,2], silicon [3,4] or polymer materials such as epoxide, polyimide [5] or polyether ether ketone (PEEK) [6]. Applications of miniaturized thermal actuators are the positioning of optical fibers [7], micro grippers [3,[8][9][10], relays [11,12], Radio Frequency (RF) switches [13] or miniaturized drives [14].…”
Section: Introductionmentioning
confidence: 99%