A sub-micron particle filter in silicon

Kittilsland, Gjermund; Stemme, Göran; Nordén, Bengt

doi:10.1016/0924-4247(90)87056-o

Cited by 64 publications

(19 citation statements)

References 6 publications

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“…This work focuses on airborne particles in the range of 1 to 10 pin [I], and micromachined membranes with perforations are ideal candidates for such filters. Although several MEMS filters [2,3,4] have been reported in the past, a comprehensive study of their strength and fluid dynamic performance is not available. For MEMS membrane filters to be effective, various requirements must be met.…”

Section: Introductionmentioning

confidence: 99%

Micromachined membrane particle filters

Yang

Tai

et al. 1999

Sensors and Actuators A: Physical

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We report herr several particle membrane filters (8 x 8 mn2) with circular, hexagonal and rectangular through holes. By varying hole dimensions from 6 to 12 pm, opening factors from 4 to 45 ?4 arc achieved. In order to improve the filter robustness, a composite silicon nitridelparylene membrane technology is developed. More importantly, fluid dynamic performance of the filters is also studied by both experiments and numerical simulations. It is found that the gaseous flow through the filters depends strongly on opening factors, and the measured pressure drops are much lower than that from numerical simulation using the Navier-Stokes equation. Interestingly, surface velocity slip can only account for a minor part of the discrepancy. This suggests that a very interesting topic for micro fluid mechanics research is identified.

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Section: Introductionmentioning

confidence: 99%

Micromachined membrane particle filters

Yang

Tai

et al. 1999

Sensors and Actuators A: Physical

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“…Hence, a filter is needed at the entrance of the fluid. A microfilter has been reported that has minute holes formed by micromachining [17]. However, in such filters, thin holes are inevitably plugged by particles, so that a mechanism is needed to remove plugging periodically.…”

Section: Fluid Filtersmentioning

confidence: 99%

Micro total analysis system (?TAS)

Shoji

1999

Electron. Comm. Jpn. Pt. II

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“…An ultra filtration membrane used for size-based separation can be fabricated either by solvent-casting or ion track etching process. Recently, a number of micromachined filtration devices have been demonstrated by making either a one-structural layer process [26,41] or a two-structural layer process [24,40] . In a one-structural layer process, the pores are directly made on a membrane layer and the pore size is determined by photolithography.…”

Section: Separationmentioning

confidence: 99%

“…Among the others, membrane with perforations (filter) is a candidate for sample collection [24,25] By passing liquid or air through the micromachined membrane as shown in Fig. 2.7 [26] , the target particle or biological agents can be collected.…”

Section: Sample Concentrationmentioning

confidence: 99%

Micro/Nano Fluidics Mechanics and Transducers

Tai

2012

Microsystems and Nanotechnology

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In biochemical analyses, sample fluid volume in the nano or pico liter range is commonly encountered in various processes. For example, the preparation, mixing, separation, and concentration of cells and biomolecules in such small amount of fluids are very often needed in most analyses. From the science and technology point of view, efficient momentum and energy transfers of the desired fluid and particle motions in such small scales need sufficient comprehension of mechanics and MEMS (micro-electro-mechanical systems) transducers of similar length scales. Interestingly, MEMS/NEMS technologies do enable us to match the device and the fluid length scale for handling fluids in extremely small volume. This opens up a tremendous opportunity for research and development. In traditional fluid dynamics, the flow length scale is much larger than the molecular length scale. Continuum mechanics is the most common hypothesis used for flow research. In the case of micro/nano engineering systems, however, one may encounter regimes from continuum all the way down to molecule-dominated conditions. Therefore, in micro/nano fluidics, there are many new challenges that are very different from those in traditional fluidic systems. In this chapter, we discuss these special issues related to micro/nano fluidics and MEMS transducers in handling extremely small amount of fluids, including embedded particles.Keywords Micro-electro-mechanical-systems (MEMS), nano sciences and technologies, sensors and actuators, microfluidics and nanofluidics, micro/Nano systems et al., Microsystems and Nanotechnology

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A sub-micron particle filter in silicon

Cited by 64 publications

References 6 publications

Micromachined membrane particle filters

Micromachined membrane particle filters

Micro total analysis system (?TAS)

Micro/Nano Fluidics Mechanics and Transducers

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