2023
DOI: 10.1038/s41467-023-36639-1
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A sub-wavelength Si LED integrated in a CMOS platform

Abstract: A nanoscale on-chip light source with high intensity is desired for various applications in integrated photonics systems. However, it is challenging to realize such an emitter using materials and fabrication processes compatible with the standard integrated circuit technology. In this letter, we report an electrically driven Si light-emitting diode with sub-wavelength emission area fabricated in an open-foundry microelectronics complementary metal-oxide-semiconductor platform. The light-emitting diode emission… Show more

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Cited by 11 publications
(3 citation statements)
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“…Silicon's indirect bandgap prevents direct electron-hole recombination at the band edge, but a number of other mechanisms nevertheless allow for optical emission by injected carriers, albeit at lower quantum efficiency. For forwardbias, injected carriers in the depletion region can recombine with the aid of phonons (Supplementary Information, 7 Forward-Bias Emission) to produce emission that peaks near the bandedge 1,7,10,15,16 (1.1 eV). In a waveguide, this emission is then filtered by absorption in the silicon between the emission region and the collection fiber.…”
Section: Emission Mechanismmentioning
confidence: 99%
“…Silicon's indirect bandgap prevents direct electron-hole recombination at the band edge, but a number of other mechanisms nevertheless allow for optical emission by injected carriers, albeit at lower quantum efficiency. For forwardbias, injected carriers in the depletion region can recombine with the aid of phonons (Supplementary Information, 7 Forward-Bias Emission) to produce emission that peaks near the bandedge 1,7,10,15,16 (1.1 eV). In a waveguide, this emission is then filtered by absorption in the silicon between the emission region and the collection fiber.…”
Section: Emission Mechanismmentioning
confidence: 99%
“…The record for the smallest emission area of an LED is 0.14 μm 2 , produced by a subwavelength silicon LED, which is smaller than an individual human or bacterial cell (Figure 2). 105 However, control of single light-sensitive proteins or individual subcellular compartments is challenging, as the wavelength of visible light would be larger than the target and shorter UV wavelengths of light are damaging to biological materials.…”
Section: Overcoming Opacity For Optogenetic Interfacementioning
confidence: 99%
“…With its integrability with complementary metal oxide semiconductor fabrication, photonic integrated circuits play a crucial role in communication technology [ 1 , 2 ]. Despite substantial advances in high-efficiency and low-cost integrated photonic devices, such as photodetectors [ 3 ], sensors [ 4 , 5 ], modulators [ 6 ], and light emitters [ 7 ], large lattice mismatch and manufacturing complexity are still limiting factors for all integrated solutions.…”
Section: Introductionmentioning
confidence: 99%