A subnanometre heterodyne interferometric system with improved phase sensitivity using a three-longitudinal-mode He-Ne laser

Yokoyama, Tomoo; Araki, Tsutomu; Yokoyama, Shuko; Suzuki, Norihito

doi:10.1088/0957-0233/12/2/305

Cited by 27 publications

(15 citation statements)

References 8 publications

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“…Figure 1 shows the schematic diagram of the optical head of a conventional three-mode laser interferometer [13][14][15][16][17]. The output laser beam is first split off by a non-polarizing beam splitter (BS).…”

Section: Structure Of Optical Head and Signal Conditionermentioning

confidence: 99%

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A Low-Nonlinearity Laser Heterodyne Interferometer with Quadrupled Resolution in the Displacement Measurement

Olyaee

Hamedi

2011

Arab J Sci Eng

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Quantitative analysis has been applied extensively for modeling and compensation of periodic nonlinearities since the invention of heterodyne laser interferometers. In this article, we mathematically analyze and modele the nonlinearity resulting from non-orthogonality and ellipticity of the polarized laser beams for a modified high-resolution nano-displacement measuring system based on a three-mode laser interferometer. Also, we present a simple method to compensate for the periodic nonlinearity in the modified system based on a two-mode type nonlinearity reduction method. The results reveal that the factor of nonlinearity reduction can reach a value of 99.9% for some special cases of deviations resulting from non-ideal polarized light. In addition to the nonlinearity compensation, we show that the resolution of the displacement measurement in the modified system is doubled and quadrupled with respect to the conventional three-and two-mode laser heterodyne interferometers, respectively.

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Section: Structure Of Optical Head and Signal Conditionermentioning

confidence: 99%

“…By using three-mode laser interferometers, resolution can be increased over that of two-mode laser interferometers [13][14][15][16][17]. In this study, we present a low-nonlinearity three-mode laser interferometer with quadrupled resolution in the nanometric displacement measurements.…”

mentioning

confidence: 99%

A Low-Nonlinearity Laser Heterodyne Interferometer with Quadrupled Resolution in the Displacement Measurement

Olyaee

Hamedi

2011

Arab J Sci Eng

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“…The low speed detector was used to compare with previous laser stabilization experiments [11,12,13]. The avalanche photodiode was use to compare with the previous superheterodyning experiment [17]. The OSA was used to verify the presence each particular mode during an experiment.…”

Section: Experimental Verificationmentioning

confidence: 99%

Frequency stabilized three mode HeNe laser using nonlinear optical phenomena

Ellis¹,

Joo²,

Buice³

et al. 2010

Opt. Express

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Accurate and traceable length metrology is employed by laser frequency stabilization. This paper describes a laser frequency stabilzation technique as a secondary standard with a fractional frequency stability of 5.2×10 −10 with 2 mW of power, suitable for practical applications. The feedback stabilization is driven by an intrinsic mixed mode signal, caused by nonlinear optical phenomena with adjacent modes. The mixed mode signals are described theoretically and experimentally verified.

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“…Nowadays, the laser heterodyne interferometers are the instrument of choice for many precision machines which can be readily extended up to a resolution less than one optical wavelength [4][5][6][7]. Enhanced heterodyne displacement measurement interferometers using a three-longitudinal-mode He-Ne laserbased super-heterodyne technique were first introduced by Yokoyama in 2001 [8]. In the super-heterodyne technique, an electronic circuit is needed to produce secondary beat frequency.…”

Section: Introductionmentioning

confidence: 99%

“…In the super-heterodyne technique, an electronic circuit is needed to produce secondary beat frequency. Though some intensive work done during the last few years, quite a few good techniques for phase measurement have become available [5,[8][9][10]. The technology of integrated optics promises high sensitivity, small overall size, and possibly low fabrication costs.…”

Section: Introductionmentioning

confidence: 99%

Design of electronic sections for nano-displacement measuring system

Olyaee

Hamedi

Dashtban

2010

Front. Optoelectron. China

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Noncontact displacement measurement is generally based on the interferometry method. In the semiconductor industry, a technique for measuring small features is required as circuit integration becomes denser and the wafer size becomes larger. An interferometric system known as a three-longitudinal-mode heterodyne interferometer (TLMI) is made of two main parts: optical setup and electronic sections. In the optical part, the base and measurement signals having 500-MHz frequency are produced, resulting from interfering three longitudinal modes. The secondary beat frequency to measure the displacement in the TLMI is about 300 kHz. To extract the secondary beat frequency, wide-band amplifiers, doublebalanced mixers (DBMs), band-pass filters (BPFs), and low-pass filters (LPFs) are used. In this paper, we design the integrated circuit of a super-heterodyne interferometer with total gain of 56.9 dB in size of 1030 µmÂ1030 µm.

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A subnanometre heterodyne interferometric system with improved phase sensitivity using a three-longitudinal-mode He-Ne laser

Cited by 27 publications

References 8 publications

A Low-Nonlinearity Laser Heterodyne Interferometer with Quadrupled Resolution in the Displacement Measurement

A Low-Nonlinearity Laser Heterodyne Interferometer with Quadrupled Resolution in the Displacement Measurement

Frequency stabilized three mode HeNe laser using nonlinear optical phenomena

Design of electronic sections for nano-displacement measuring system

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