A surface acoustic wave impedance-loaded high sensitivity sensor with wide dynamic range for ultraviolet light detection

Karapetyan, G. Ya.; Kaydashev, V. E.; Жилин, Д. А.; Kutepov, M. E.; Minasyan, T. A.; Кайдашев, Е. М.

doi:10.1016/j.sna.2019.07.010

Cited by 10 publications

(3 citation statements)

References 18 publications

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“…[67] The application of surface acoustic wave (SAW) technology can be extended for the detection of gases as well. [68,69] The application of SAW sensors are flexible, and it is widely used for the detection of various gases, [70][71][72] environmental changes such as pressure, [73] humidity, [74] UV radiation, [75] etc., besides the chemical and biological sensing applications. [76,77] Sensitivity, reversibility, less reaction and desorption time, and high selectivity are the important performance characteristics for SAW sensors.…”

Section: Gas/vapor Sensing 31 Types Of Gas/vapor Sensorsmentioning

confidence: 99%

Electrospun ZnO Nanofiber Based Resistive Gas/Vapor Sensors -A Review

Prabhu¹,

Chandra²,

Rajendra³

et al. 2022

Eng. Sci.

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Resistive zinc oxide (ZnO) sensors play a pivotal role in detecting various gases and vapors due to their high response, low cost, stability, tunability, and simple fabrication. Hence, it is necessary to know the recent status of research in resistive ZnO sensors. The sensitivity is determined by the reactions at the surface of the nanofiber (NF); therefore, the surface area defines the foremost sensor characteristics. Electrospun metal oxide NFs exhibit a high surface area and unique electrical properties that can be tuned, and they are highly sought as the materials for resistive gas sensors. So far, various strategies are adopted to improve the sensitivity and the selectivity of ZnO NFs. This review summarizes the recent methods utilized by various researchers to improve the sensitivity of the ZnO electrospun metal oxide NF-based resistive gas sensors. Also, it discusses the influence of process parameters on the structure and morphology of ZnO NFs, the mechanism of gas sensing and highlights its improvement through advanced methods. The sensitivity of the NF has been improved through tuning the structure and morphology of NFs and doping. Further, modification of NF sensitivity through functionalization, the addition of carbon nanomaterials, and high-energy irradiation are also discussed. Based on the recent literature, the performance of doped ZnO NF for various gas sensing is highlighted. The outcome of this review gives insight to academic researchers and industry for further investigation and development in resistive gas sensors and its applications.

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Section: Gas/vapor Sensing 31 Types Of Gas/vapor Sensorsmentioning

confidence: 99%

Electrospun ZnO Nanofiber Based Resistive Gas/Vapor Sensors -A Review

Prabhu¹,

Chandra²,

Rajendra³

et al. 2022

Eng. Sci.

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“…The use of such materials in SAW delay lines in the form of thin films or pillars opens up the possibility of modulating the elastic wave velocity and phase by controlling the number of free carriers and changing the conductance (σ) with external excitation [26]. This effect can be exploited to design sensitive SAW devices for applications such as hydrogen [27], ultraviolet (UV) light [28], and biological [29] sensors, as well as devices such as tunable elastic waveguides and demultiplexers [9,14]. In the Si substrate/ZnO pillar SAW configuration, it is shown that the elastic wave transmission peak, shifts by about 100 MHz due to the phase change caused by ZnO conductivity modulation when illuminated by a 365 nm UV light source [14].…”

Section: Introductionmentioning

confidence: 99%

Vertical Surface Phononic Mach-Zehnder Interferometer

Sharaf

Darbari²,

Khelif³

2023

Phys. Rev. Applied

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In this work, we propose and evaluate a novel non-planar design of a doublestage phononic crystal (PnC) consisting of a Si substrate, a bottom layer of ZnO, Si pillars and another ZnO layer on top of the pillars. The proposed double-stage PnC exhibits interesting properties such as routing of incoming elastic wave based on source polarization and frequency. In addition, the elastic energy profile of the surface coupled modes are distributed between surface layers including two ZnO layers and pillars dividing the incoming elastic wave between top and bottom ZnO layers. Therefore, the proposed doublestage PnC can be considered as a building block in the design of a super-sensitive structure. The top ZnO layer's conductivity is modulated based on acoustoelectric effect when exposed to an external excitation like UV light illumination and environmental gases such as hydrogen. The proposed super-sensitive device, benefits from higher coupling between local resonators and therefore, the higher phase change between two branches of the elastic Mach-Zehnder which leads to a sensitivity and transmission as high as 23 and -8 dB at 8.6 GHz. Moreover, the proposed elastic Mach-Zehnder has the advantage of avoiding the non-sensing parts such as bottom ZnO layer as the reference branch, pillars and substrate to be affected by the external excitation due to the vertical configuration.

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“…A considerable advantage of this type of sensor is that it is versatile, which allows for adaptation to different applications [ 21 ]. SAW sensors are used for the detection of gases [ 22 , 23 , 24 ], as well as for the detection of liquids or other changes in the environment, such as pressure [ 25 ], humidity [ 26 ], the presence of UV radiation [ 27 ], and for chemical and biological applications [ 28 , 29 ]. In this work, we focused on the study of SAW sensors for gas detection.…”

Section: Introductionmentioning

confidence: 99%

ZnO Metal Oxide Semiconductor in Surface Acoustic Wave Sensors: A Review

Constantinoiu

Viespe

2020

Sensors

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Surface acoustic wave (SAW) gas sensors are of continuous development interest to researchers due to their sensitivity, short detection time, and reliability. Among the most used materials to achieve the sensitive film of SAW sensors are metal oxide semiconductors, which are highlighted by thermal and chemical stability, by the presence on their surface of free electrons and also by the possibility of being used in different morphologies. For different types of gases, certain metal oxide semiconductors are used, and ZnO is an important representative for this category of materials in the field of sensors. Having a great potential for the development of SAW sensors, the discussion related to the development of the sensitivity of metal oxide semiconductors, especially ZnO, by the synthesis method or by obtaining new materials, is suitable and necessary to have an overview of the latest results in this domain.

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A surface acoustic wave impedance-loaded high sensitivity sensor with wide dynamic range for ultraviolet light detection

Cited by 10 publications

References 18 publications

Electrospun ZnO Nanofiber Based Resistive Gas/Vapor Sensors -A Review

Electrospun ZnO Nanofiber Based Resistive Gas/Vapor Sensors -A Review

Vertical Surface Phononic Mach-Zehnder Interferometer

ZnO Metal Oxide Semiconductor in Surface Acoustic Wave Sensors: A Review

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