A surface data generation method of optical micro-structure and analysis system for Fast Tool Servo fabricating

Abstract

High-precision optical micro-structured components are now widely used in the field of military and civilian use. Ultraprecision machining with a fast tool servo (FTS) is one of the leading methodologies for fabrication of such surfaces. The first important issue that faced in ultra-precision and high-effectively fabricating is how to properly describe the complex shapes based on the principle of FTS. In order to meet the demands of FTS machining that need for tool high-frequency response, high data throughput and huge memory space, an off-line discrete data points generation method for microstructure surfaces is presented which can avoid on-line shape calculation in fabricating process. A new analysis software package is developed to compute the speed, acceleration and spectrum over the generated data points which helps to analysis the tool tracking characteristics needed in fabricating. Also a new mechanism for FTS machining data transmission based on the huge-capacity storage device is proposed. Experiments show that the off-line surface data generation method and data transfer mechanism can effectively improve FTS fabricating efficiency, the surface analysis software can help to determine the machining ability of tool-holder and to guide and optimize the processing parameters such as spindle speed, feed rate, etc.