A surface-micromachined vertical scanning micromirror

Abstract

A vertically supported, two-axial scanning micromirror with an optical reflection area of 600 µm × 600 µm has been successfully demonstrated using a 2 µm thick standard planar polysilicon surface micromachining process. The micromirror was lifted from the substrate and vertically supported by locking springs and hinges using a micromanipulator under a probe station. It was torsionally actuated in the two orthogonal angular directions including the first that is normal to the substrate and the second that is normal to the plane of the vertically supported microstructure. Furthermore, under an ac driving voltage of 2.5 V and dc bias voltage of 5 V, it was able to reflect and generate laser light patterns on a distant screen. The scanned and reflected laser light was able to make a circular pattern at f = 387 Hz, an elliptical pattern at f = 350 Hz and a line pattern at f = 427 Hz. As such, this surface-micromachined vertical mirror system could have potential applications for an optical bench on a chip.

Conducting polymer microactuators operating in air

“…The micromirrors are essential components of microscopes, scanners, optical switches, projection displays, interferometers and similar. Traditionally, microstructrues holding the mirrors are fabricated using surface and bulk micromachining techniques from polysilicon, metals and similar materials, but require high operation voltages ranging from 18 V to 75 V [20]. It must be recalled that the microcantilever based on the conducting polymer actuator requires typically 1 V and 15 mA.…”

Large aperture surface-micromachined rotating micromirror with the majority of dimples removed

“…Surface micromachined rotating micromirrors have been developed for various applications, such as displays [1][2][3][4][5][6] and optical switches [7][8][9]. In order to rotate the micromirror, especially when the aperture of micromirror is large, e.g.…”

Fabrication of Silicon Microdisk Resonators with Movable Waveguides for Control of Power Coupling Ratio

“…The MEMS technology is widely used for tuning and switching a variety of optical devices such as optical sensors, optical scanners, and optical switches. [1][2][3][4][23][24][25][26][27][28][29][30][31][32][33] Several MEMS-actuated optical resonators have also been reported. [1][2][3][4] Takahashi et al fabricated a wavelength-selective add-drop switch using a silicon microring resonator with a comb-drive microactuator.…”