A surface topographic investigation of {001} diamond surfaces etched in oxygen

Theije, F.K. de; Laag, N.J. van der; Plomp, Marco; Enckevort, W.J.P. van

doi:10.1080/01418610008212078

Cited by 34 publications

(16 citation statements)

References 45 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Oxygen adsorbs favorably in the ketone configuration on {111} and {110} surfaces, whilst ether is favourable on {100}. 52 A detailed analysis of adsorption geometries is provided in the SI. Bond distances calculated here agree well with previously reported values calculated using the DFT-GGA approximation, 49,53,54 gases which can be adsorbed.…”

Section: Role Of Hydrogen In Etch Rate Anisotropy and Pattern Formationmentioning

confidence: 99%

Deterministic Nanopatterning of Diamond Using Electron Beams

et al. 2018

View full text Add to dashboard Cite

Diamond is an ideal material for a broad range of current and emerging applications in tribology, quantum photonics, high-power electronics, and sensing. However, top-down processing is very challenging due to its extreme chemical and physical properties. Gas-mediated electron beam-induced etching (EBIE) has recently emerged as a minimally invasive, facile means to dry etch and pattern diamond at the nanoscale using oxidizing precursor gases such as O and HO. Here we explain the roles of oxygen and hydrogen in the etch process and show that oxygen gives rise to rapid, isotropic etching, while the addition of hydrogen gives rise to anisotropic etching and the formation of topographic surface patterns. We identify the etch reaction pathways and show that the anisotropy is caused by preferential passivation of specific crystal planes. The anisotropy can be controlled by the partial pressure of hydrogen and by using a remote RF plasma source to radicalize the precursor gas. It can be used to manipulate the geometries of topographic surface patterns as well as nano- and microstructures fabricated by EBIE. Our findings constitute a comprehensive explanation of the anisotropic etch process and advance present understanding of electron-surface interactions.

show abstract

Section: Role Of Hydrogen In Etch Rate Anisotropy and Pattern Formationmentioning

confidence: 99%

Deterministic Nanopatterning of Diamond Using Electron Beams

et al. 2018

View full text Add to dashboard Cite

show abstract

“…The oxidative etching of diamond with O2 and O2/H2O, as well as thermal and hyperthermal atomic oxygen have indicated that the {100} planes are more erosion resistant compared to the {111} planes [1][2][3][4][5][6][7]. A similar phenomenon was also observed in the case of H2O etching of conductive boron-doped diamond (BDD), where steam activation of BDD lead to preferential etching of the {111} planes [13,14].…”

Section: Introductionmentioning

confidence: 54%

“…The etching of diamond has been studied both from fundamental standpoints [1][2][3][4][5][6][7] as well as for practical applications in conductive diamond electrodes [8][9][10][11][12].…”

Section: Introductionmentioning

confidence: 99%

Preferential {100} etching of boron-doped diamond electrodes and diamond particles by CO2 activation

Zhang

Nakai²,

Uno³

et al. 2014

Carbon

View full text Add to dashboard Cite

The etching behavior of polycrystalline boron-doped diamond (BDD) electrodes and diamond particles with gaseous CO2 at 800 and 900 °C was investigated by field-emission scanning electron microscopy, atomic force microscopy and X-ray photoelectron spectroscopy. Polycrystalline BDD (800 ppm), composed of a mixture of cubic {100} and triangular {111} orientated planes, was used so as to pursue the possibility of preferential etching by high temperature CO2 treatment. Nanometer sized pits were observed on the {100} planes while no change was observable for the {111} planes when the activation temperature was 800 °C. The difference in the etching behavior by CO2 with regard to the different planes was clarified using diamond particles and comparing with steam activation. The results demonstrate that CO2 activation leads to preferential {100} etching, whereas steam-activation results in preferential {111} etching.3

show abstract

“…These include oxygens in different positions (peroxides, epoxides, ethers, ketones), hydroxyls, carboxyls, and anhydrides. We choose energetically the most probable functional group for 1 × 1 and 2 × 1 surface reconstructions of both the (111) and (100) ND slabs based on published theoretical and experimental works and our preliminary calculations. The amorphous carbon layer was saturated by hydrogens (a‐C:H) or by a mixture of hydrogens and oxygens (a‐C:O), resembling the polyfunctional detonation NDs used in practical experiments.…”

Section: Computational Detailsmentioning

confidence: 99%

Structural and Electronic Properties of Oxidized and Amorphous Nanodiamond Surfaces with Covalently Grafted Polypyrrole

Matunová

Jirásek

Rezek

2019

Physica Status Solidi (b)

View full text Add to dashboard Cite

Diamond nanoparticles denoted as nanodiamonds (NDs) possess numerous beneficial material properties and are envisioned for a wide range of applications. In this work, complexes of polypyrrole (PPy) organic dye covalently grafted to ND surfaces are investigated by atomic scale density functional theory (DFT) computations with a view to their structural and electronic properties. NDs terminated with oxygen, hydroxyl, carboxyl, anhydride, as well as amorphous carbon (a‐C:H, a‐C:O) have been considered. Thereby the theoretical model is brought close to real nanodiamonds. Spatially separated highest occupied molecular orbitals (HOMO) and lowest unoccupied molecular orbitals (LUMO) and a favorable energetic level alignment at the ND–PPy interface are observed for the majority of the oxidized NDs. This feature is also retained for NDs with amorphous surface layer. Excited states are computed by time‐dependent DFT to analyze how the electronic configuration can promote dissociation of excitons, for instance in photovoltaic applications.

show abstract

A surface topographic investigation of {001} diamond surfaces etched in oxygen

Cited by 34 publications

References 45 publications

Deterministic Nanopatterning of Diamond Using Electron Beams

Deterministic Nanopatterning of Diamond Using Electron Beams

Preferential {100} etching of boron-doped diamond electrodes and diamond particles by CO2 activation

Structural and Electronic Properties of Oxidized and Amorphous Nanodiamond Surfaces with Covalently Grafted Polypyrrole

Contact Info

Product

Resources

About