A survey of MEMS cantilever applications in determining volatile organic compounds

Suresh, Vasagiri; Burra, Rajesh Kumar; Jyothi, Vankara; Patnaik, M.S. Pradeep Kumar

doi:10.1063/5.0075034

Cited by 10 publications

(3 citation statements)

References 64 publications

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“…MEMS devices are subjected to unexpected or overloaded mechanical shock from time to time during normal operation. For instance, a large shock may be induced by a cell phone falling from a certain height, a car subjected to an external shock, a flying vehicle landing, or a cannonball launch [ 29 , 30 ]. Some typical shock scenarios are listed in Table 2 [ 31 ].…”

Section: Mems Reliability With Consideration Of Shockmentioning

confidence: 99%

Reliability of MEMS inertial devices in mechanical and thermal environments: A review

Xu,

Liu,

et al. 2024

Heliyon

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Section: Mems Reliability With Consideration Of Shockmentioning

confidence: 99%

Reliability of MEMS inertial devices in mechanical and thermal environments: A review

Xu,

Liu,

et al. 2024

Heliyon

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“…Despite the challenges listed, cantilever sensors have been demonstrated as an extremely useful base platform upon which more advanced sensing systems can be developed. While this perspective has demonstrated their utility in optomechanical sensing, cantilever sensors have seen extensive use in MEMS devices [ 141 , 142 ]. This is perhaps the most advantageous aspect of cantilever sensors—their ability to be integrated in numerous configurations and techniques of sensing systems.…”

Section: Optical and Mechanical Sensors—advantages Challenges And The...mentioning

confidence: 99%

The Development of Optomechanical Sensors—Integrating Diffractive Optical Structures for Enhanced Sensitivity

McGovern

Hernik

Grogan

et al. 2023

Sensors

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The term optomechanical sensors describes devices based on coupling the optical and mechanical sensing principles. The presence of a target analyte leads to a mechanical change, which, in turn, determines an alteration in the light propagation. Having higher sensitivity in comparison with the individual technologies upon which they are based, the optomechanical devices are used in biosensing, humidity, temperature, and gases detection. This perspective focuses on a particular class, namely on devices based on diffractive optical structures (DOS). Many configurations have been developed, including cantilever- and MEMS-type devices, fiber Bragg grating sensors, and cavity optomechanical sensing devices. These state-of-the-art sensors operate on the principle of a mechanical transducer coupled with a diffractive element resulting in a variation in the intensity or wavelength of the diffracted light in the presence of the target analyte. Therefore, as DOS can further enhance the sensitivity and selectivity, we present the individual mechanical and optical transducing methods and demonstrate how the DOS introduction can lead to an enhanced sensitivity and selectivity. Their (low-) cost manufacturing and their integration in new sensing platforms with great adaptability across many sensing areas are discussed, being foreseen that their implementation on wider application areas will further increase.

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“…Several different approaches form the current state-of-the-art in VOC sensing which included semiconductor, MEMS, optical fiber and gravimetric devices have been demonstrated [12][13][14][15]. While all techniques listed have achieved high sensitivity, with detection limits as low as the ppb range for metal oxide semiconductor sensors [16], they face a number of challenges.…”

Section: Introductionmentioning

confidence: 99%

Developing novel holographic optomechanical sensing platform for detection of volatile organic compounds

McGovern

Grogan

Amarandei

et al. 2023

Holography: Advances and Modern Trends VIII

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Detecting volatile organic compounds (VOCs) is important, their presence in modern indoor environments being associated to health risks including respiratory diseases and cancers. State-of-the-art VOCs sensors as MEMS and semiconductor devices achieve high sensitivity but exhibit poor selectivity and high cross-sensitivity with other environmental analytes including temperature and humidity. Such sensors often require complex and costly fabrication/operation processes and/or expensive readout equipment. Here, a novel optomechanical sensing platform, based on the combination of a holographic diffractive element and a static deflection bilayer cantilever, is presented. Its operation principle is based on the differential response of the cantilever layers to target analytes, and was verified using COMSOL Multiphysics. The cantilever deflection due to analyte presence was visually measured. As the sensitive layer is a photopolymer, a transmission volume holographic diffraction grating was recorded enabling a second, more sensitive, detection mode based on the variations in the diffracted beam intensity as the cantilever deflection angle changes. We compared the sensitivity of the optomechanical holographic sensor configuration to that of a holographic diffraction grating in a photopolymer layer coated on a glass slide. Selectivity and sensitivity of both configurations was increased by doping the photopolymer matrix with zeolite nanoparticles. The initial tests monitored the diffraction efficiency changes during the 5 minutes exposure time to 1000 ppm ethanol. The TOS presented changes of 1-4% in diffraction efficiency depending on the dopant concentration and photopolymer layer thickness, while the optomechanical sensor exhibited 7-14% change in diffraction efficiency.

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A survey of MEMS cantilever applications in determining volatile organic compounds

Cited by 10 publications

References 64 publications

Reliability of MEMS inertial devices in mechanical and thermal environments: A review

Reliability of MEMS inertial devices in mechanical and thermal environments: A review

The Development of Optomechanical Sensors—Integrating Diffractive Optical Structures for Enhanced Sensitivity

Developing novel holographic optomechanical sensing platform for detection of volatile organic compounds

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