A Suspended Silicon Single‐Hole Transistor as an Extremely Scaled Gigahertz Nanoelectromechanical Beam Resonator

Zhang, Zhuo‐Zhi; Hu, Qitao; Song, Xiang‐Xiang; Ying, Yue; Li, Haiou; Zhang, Zhen; Guo, Guo-Ping

doi:10.1002/adma.202005625

Cited by 5 publications

(2 citation statements)

References 44 publications

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“…The experimental characterization of the device is performed at ∼20 mK. We use a frequency modulation (FM) mixing technique ,, to measure the mechanical resonance of the NEMPA. The key advantage of the FM technique is that it only detects contributions from mechanical vibrations of the device, thus providing an ideal way for electrically detecting mechanical response.…”

Section: Resultsmentioning

confidence: 99%

Graphene-Based Nanoelectromechanical Periodic Array with Tunable Frequency

et al. 2021

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Phononic crystals (PnCs) have attracted much attention due to their great potential for dissipation engineering and propagation manipulation of phonons. Notably, the excellent electrical and mechanical properties of graphene make it a promising material for nanoelectromechanical resonators. Transferring a graphene flake to a prepatterned periodic mechanical structure enables the realization of a PnC with on-chip scale. Here, we demonstrate a nanoelectromechanical periodic array by anchoring a graphene membrane to a 9 × 9 array of standing nanopillars. The device exhibits a quasi-continuous frequency spectrum with resonance modes distributed from ∼120 MHz to ∼980 MHz. Moreover, the resonant frequencies of these modes can be electrically tuned by varying the voltage applied to the gate electrode sitting underneath. Simulations suggest that the observed band-like spectrum provides an experimental evidence for PnC formation. Our architecture has large fabrication flexibility, offering a promising platform for investigations on PnCs with electrical accessibility and tunability.

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Section: Resultsmentioning

confidence: 99%

Graphene-Based Nanoelectromechanical Periodic Array with Tunable Frequency

et al. 2021

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“…To detect the mechanical resonance of the nanomechanical resonator, a frequency modulation (FM) mixing technique 46,47…”

Section: Measurement Setupmentioning

confidence: 99%

Sliding nanomechanical resonators

et al. 2022

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The motion of a vibrating object is determined by the way it is held. This simple observation has long inspired string instrument makers to create new sounds by devising elegant string clamping mechanisms, whereby the distance between the clamping points is modulated as the string vibrates. At the nanoscale, the simplest way to emulate this principle would be to controllably make nanoresonators slide across their clamping points, which would effectively modulate their vibrating length. Here, we report measurements of flexural vibrations in nanomechanical resonators that reveal such a sliding motion. Surprisingly, the resonant frequency of vibrations draws a loop as a tuning gate voltage is cycled. This behavior indicates that sliding is accompanied by a delayed frequency response of the resonators, making their dynamics richer than that of resonators with fixed clamping points. Our work elucidates the dynamics of nanomechanical resonators with unconventional boundary conditions, and offers opportunities for studying friction at the nanoscale from resonant frequency measurements.

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Nanomechanical vibrational response from electrical mixing measurements

Samanta,

Czaplewski,

Bonis

et al. 2023

Applied Physics Letters

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Driven nanomechanical resonators based on low-dimensional materials are routinely and efficiently detected with electrical mixing measurements. However, the measured signal is a non-trivial combination of the mechanical eigenmode displacement and an electrical contribution, which makes the extraction of the driven mechanical response challenging. Here, we report a simple yet reliable method to extract solely the driven mechanical vibrations by eliminating the contribution of pure electrical origin. This enables us to measure the spectral mechanical response as well as the driven quadratures of motion. This method is crucial for nanomechanical vibrations in the nonlinear regime, since the shape of the mechanical response depends on the physics at work. We further show how to calibrate the measured signal into units of displacement. Our method marks a key step forward in the study of nanoelectromechanical resonators based on low-dimensional materials in the nonlinear regime.

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A Suspended Silicon Single‐Hole Transistor as an Extremely Scaled Gigahertz Nanoelectromechanical Beam Resonator

Cited by 5 publications

References 44 publications

Graphene-Based Nanoelectromechanical Periodic Array with Tunable Frequency

Graphene-Based Nanoelectromechanical Periodic Array with Tunable Frequency

Sliding nanomechanical resonators

Nanomechanical vibrational response from electrical mixing measurements

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