A temperature self-calibrating torsional accelerometer with fully differential configuration and integrated reference capacitor

Xiao, Dingbang; Xia, Dewei; Li, Qingsong; Wu, Yulie; Chen, Zhihua; Wu, Xuezhong

doi:10.1109/icsens.2015.7370428

Cited by 3 publications

(1 citation statement)

References 10 publications

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“…Although the stress optimization of the accelerometer structure including the special anchor layout becomes one of the necessary steps of suppressing the bias drift, it still requires alternative passive suppression methods to eliminate the bias drift. Xiao et al [10] designed a MEMS accelerometer with a double differential structure and an onchip reference capacitor for the compensation of temperature drift. The results showed that TDC was reduced from 9.1 to 0.61 mg • C −1 for a temperature change from −40 • C to 60 • C. Zhang et al [11] introduced an 8 kHz sinusoidal exciting signal to drive the accelerometer along the orthogonal direction and the demodulated phase is utilized to calibrate and compensate for temperature drift.…”

Section: Introductionmentioning

confidence: 99%

Characterization and compensation of thermal bias drift of a stiffness-tunable MEMS accelerometer

Zhang¹,

Jin²,

Ye³

et al. 2022

J. Micromech. Microeng.

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This paper presents characterization and compensation of the thermal bias drift of a MEMS accelerometer whose effective stiffness is electrostatically tuned to a low value with the help of the single-sided parallel plates (SSPP) capacitors. A temperature drift model for the proposed accelerometer is built and the temperature effect on the mechanical stiffness and the circuit gains is characterized. The characterization reveals that the variations of the feedforward coefficient including the mechanical stiffness and the readout gain due to the temperature change play a significant role in the bias drift of output of the proposed closed-loop accelerometer. On the other hand, the variations of both feedback gain and tuning gain as a function of temperature are one-order-of-magnitude less than that of the feedforward coefficient. To calibrate the feedforward coefficient, an excitation signal as a form of AC reference displacement is introduced to drive the proof mass and the readout response is demodulated to calibrate the variance of the feedforward coefficient correspondingly. An open-loop compensation scheme for the temperature-induced bias drift using the variance of the calibrated response is proposed accordingly. Alternatively, the calibrated response can be controlled to a preset value by a new proportion integral derivative (PID) controller by the adjustment of the SSPP tuning voltage. The output of the PID controller is used for the calibration of the introduced bias from the electrostatic tuning force. Therefore, a closed-loop compensation of the thermal bias drift is achieved by remaining the feedforward coefficient while eliminating the calibrated bias. Experiments under a temperature cooling process and different tuning voltages are carried out to verify two proposed compensation schemes. The temperature drift coefficients of both compensated outputs exhibit at least one-order-of-magnitude reduction in response to the temperature change. When the effective stiffness of the accelerometer is tuned to about 4.19 N/m, the temperature drift coefficient (TDC) of the compensated output using the proposed open-loop or closed-loop compensation schemes is reduced to about 0.1136 mg/°C or 0.0391 mg/°C, respectively and meanwhile, the Allan bias instability (BI) is slightly increased to 48.63 μg or 56.14 μg, respectively.

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Section: Introductionmentioning

confidence: 99%

Characterization and compensation of thermal bias drift of a stiffness-tunable MEMS accelerometer

Zhang¹,

Jin²,

Ye³

et al. 2022

J. Micromech. Microeng.

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Temperature Bias Drift Phase-Based Compensation for a MEMS Accelerometer with Stiffness-Tuning Double-Sided Parallel Plate Capacitors

Zhang

Jin

et al. 2023

Nanomanuf Metrol

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This paper reports an approach of in-operation temperature bias drift compensation based on phase-based calibration for a stiffness-tunable MEMS accelerometer with double-sided parallel plate (DSPP) capacitors. The temperature drifts of the components of the accelerometer are characterized, and analytical models are built on the basis of the measured drift results. Results reveal that the temperature drift of the acceleration output bias is dominated by the sensitive mechanical stiffness. An out-of-bandwidth AC stimulus signal is introduced to excite the accelerometer, and the interference with the acceleration measurement is minimized. The demodulated phase of the excited response exhibits a monotonic relationship with the effective stiffness of the accelerometer. Through the proposed online compensation approach, the temperature drift of the effective stiffness can be detected by the demodulated phase and compensated in real time by adjusting the stiffness-tuning voltage of DSPP capacitors. The temperature drift coefficient (TDC) of the accelerometer is reduced from 0.54 to 0.29 mg/°C, and the Allan variance bias instability of about 2.8 μg is not adversely affected. Meanwhile, the pull-in resulting from the temperature drift of the effective stiffness can be prevented. TDC can be further reduced to 0.04 mg/°C through an additional offline calibration based on the demodulated carrier phase representing the temperature drift of the readout circuit.

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A Calculation Method for the Optimal Initial Polar Distance of Capacitive Force Sensors

Zhang

Qi-hong

et al. 2023

IEEE Sensors J.

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A temperature self-calibrating torsional accelerometer with fully differential configuration and integrated reference capacitor

Cited by 3 publications

References 10 publications

Characterization and compensation of thermal bias drift of a stiffness-tunable MEMS accelerometer

Characterization and compensation of thermal bias drift of a stiffness-tunable MEMS accelerometer

Temperature Bias Drift Phase-Based Compensation for a MEMS Accelerometer with Stiffness-Tuning Double-Sided Parallel Plate Capacitors

A Calculation Method for the Optimal Initial Polar Distance of Capacitive Force Sensors

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