Equipment fault diagnosis NER is to extract specific entities from Chinese equipment fault diagnosis text, which is the premise of constructing an equipment fault diagnosis knowledge graph. Named entity recognition for equipment fault diagnosis can also provide important data support for equipment maintenance support. Equipment fault diagnosis text has complex semantics, fuzzy entity boundaries, and limited data size. In order to extract entities from the equipment fault diagnosis text, this paper presents an NER model for equipment fault diagnosis based on RoBERTa-wwm-ext and Deep Learning network integration. Firstly, this model uses the RoBERTa-wwm-ext to extract context-sensitive embeddings of text sequences. Secondly, the context feature information is obtained through the BiLSTM network. Thirdly, the CRF is combined to output the label sequence with a constraint relationship, improve the accuracy of sequence labeling task, and complete the entity recognition task. Finally, experiments and predictions are carried out on the constructed dataset. The results show that the model can effectively identify five types of equipment fault diagnosis entities and has higher evaluation indexes than the traditional model. Its precision, recall, and F1 value are 94.57%, 95.39%, and 94.98%, respectively. The case study proves that the model can accurately recognize the entity of the input text.