2022
DOI: 10.1007/s00170-022-10643-z
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A theoretical and experimental investigation into tool setting induced form error in diamond turning of micro-lens array

Abstract: Micro-lens array (MLA) has been widely used for 3D imaging etc., due to its excellent functional performances. Ultra-precision diamond turning (UPDT) offers a satisfying solution to the fabrication of micro-lens array with sub-micron form accuracy and nanometric surface roughness. However, the deviation between spindle to tool tip, i.e. tool setting error, is a crucial factor deteriorating form accuracy in UPDT. This study focuses on discussing the effect of tool setting errors on form error in UPDT of MLA. Fi… Show more

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Cited by 7 publications
(4 citation statements)
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References 27 publications
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“…Zhang et al (Zhang et al, 2020) used a femtosecond laser to fabricate the MLA on ZnSe; results show the root-mean-square deviation between the measured cross-sectional profile and the ideal parabola was less than 70nm. Guo et al (Guo et al, 2022) fabricated MLA on isotropic oxygen-free copper using a two-step tool setting method in diamond turning. The surface topography measurement was conducted on a white light interferometer, and an error of 65 nm has been obtained.…”
Section: Resultsmentioning
confidence: 99%
“…Zhang et al (Zhang et al, 2020) used a femtosecond laser to fabricate the MLA on ZnSe; results show the root-mean-square deviation between the measured cross-sectional profile and the ideal parabola was less than 70nm. Guo et al (Guo et al, 2022) fabricated MLA on isotropic oxygen-free copper using a two-step tool setting method in diamond turning. The surface topography measurement was conducted on a white light interferometer, and an error of 65 nm has been obtained.…”
Section: Resultsmentioning
confidence: 99%
“…According to these authors, taking tool-workpiece compliance into account is essential for developing a more accurate model. Guo et al [22] explored the influence of tool setting on the form error in MLA (Micro Lens Array) manufacturing and proposed a novel two-step tool setting strategy for UPDT (Ultra-Precision Diamond Turning) in their research. Initially, they established a theoretical model to describe form errors in MLA resulting from tool setting inaccuracies.…”
Section: Introductionmentioning
confidence: 99%
“…Ultra-precision machining (UPM) is one of the most advanced fabrication methods to create a high-quality surface with a sub-micrometric form accuracy and nanometric surface roughness [1]. In UPM, there are inevitably various errors that affect the surface quality of the machined components, such as geometric errors [2,3], tool errors [4,5], thermal errors [6,7], dynamic errors [8,9], etc. The geometric errors, as a crucial contributor of up to 40-70%, majorly affect the form accuracy of a machined surface [10].…”
Section: Introductionmentioning
confidence: 99%