2013
DOI: 10.1007/s12541-013-0025-y
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A theoretical deformation prediction of micro channels in ultra-precision machining

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Cited by 9 publications
(7 citation statements)
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“…Recent precision machine tools have evolved to the extent where the resolution is less than or equal to 1 nm, and the development of this equipment technology has led to the study of the micropattern machining of various contents [9][10][11][12][13][14][15].…”
Section: Introductionmentioning
confidence: 99%
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“…Recent precision machine tools have evolved to the extent where the resolution is less than or equal to 1 nm, and the development of this equipment technology has led to the study of the micropattern machining of various contents [9][10][11][12][13][14][15].…”
Section: Introductionmentioning
confidence: 99%
“…Precision turning can produce microstructures with a simple cross-section with a single repeated shape such as triangles or rectangles at higher speeds. In addition, more complicated cross-sectional shapes can be realized when the precision turning process is combined with additional devices such as a fast tool servo (FTS) and a slow tool servo (STS) [13,14,16,17].…”
Section: Introductionmentioning
confidence: 99%
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“…Due to the complexity of the reliability and performance problems caused by profound high speed effects [1][2][3], the machine tools capable of achieving the high speed cutting were first introduced commercially in 1980s, which lags behind the theory of high speed metal cutting by 50 years [4]. Motorized spindles are the core components of CNC machine tools and greatly improve the cutting speed, while the inevitable unbalance of the spindle system caused by unexpected errors during manufacturing and installation process strongly influences the machining productivity and finish quality of workpieces in high speed operating conditions [5][6][7][8][9][10][11].…”
Section: Introductionmentioning
confidence: 99%
“…Cheng et al [18] built a simulation system to predict the surface generation precision and optimize cutting conditions and cutting strategy in ultra-precision raster milling. Duong et al [19] introduced a prediction method for the deformation of the microchannels in the ultra-precision machining process.…”
Section: Introductionmentioning
confidence: 99%