A theoretical study of the VOC sensor based on polymer-coated diaphragm embedded with FBAR

Guo, Hailin; Gao, Yang; Liu, Tingting

doi:10.1016/j.measurement.2018.07.021

Cited by 16 publications

(10 citation statements)

References 15 publications

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“…Te density change of the AlN thin flm would lead to the frequency decrease [26]. Te reaction between ethanol and the adsorbed oxygen is shown as follows [27]:…”

Section: Experiments and Sensor Signalmentioning

confidence: 99%

A Film Bulk Acoustic Resonator-Based Sensor with AlN Piezoelectric Material for Detecting Ethanol and Acetone

Zhu

Feng

Lian

2022

Shock and Vibration

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Measurement of a volatile solution is essential for laboratory safety and hospital clinic safety. In this paper, we present an ethanol-sensing and acetone-sensing device using an AlN piezoelectric material-based film bulk acoustic resonator (FBAR). In order to realize volatile solution sensing, the AlN-based FBAR was designed, fabricated, and characterized. In our sensor structure, the upper electrode is a Ti/Au (30 nm/150 nm) composite electrode, the bottom electrode is Mo material with 150 nm thickness, and the piezoelectric sensing material is 0.8 μm thickness AlN. We conducted the experiment of ethanol measurement and acetone measurement by using this FBAR detector on the probe station within the vector network analyzer. The resonance frequency of the FBAR detector decreased as the concentration of ethanol increases, while under the circumstance of acetone concentration increasing, the detector’s response is the opposite. The sensing mechanisms of both ethanol measurement and acetone measurement are discussed in this paper, demonstrating that this FBAR detector could be able to distinguish acetone from ethanol due to different sensing mechanisms.

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“…Te density change of the AlN thin flm would lead to the frequency decrease [26]. Te reaction between ethanol and the adsorbed oxygen is shown as follows [27]:…”

Section: Experiments and Sensor Signalmentioning

confidence: 99%

A Film Bulk Acoustic Resonator-Based Sensor with AlN Piezoelectric Material for Detecting Ethanol and Acetone

Zhu

Feng

Lian

2022

Shock and Vibration

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“…Guo et al [190] presented a theoretical approach to study VOC sensor based on polymeric layer coated diaphragm integrated with FBAR. The polymer layer undergoes swelling on the absorption of analyte vapors that causes deformation of the diaphragm resulting in bending stress on piezoelectric film.…”

Section: Exemplary Sensor Applicationsmentioning

confidence: 99%

An Overview of High Frequency Acoustic Sensors—QCMs, SAWs and FBARs—Chemical and Biochemical Applications

Mujahid

Afzal

Dickert

2019

Sensors

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Acoustic devices have found wide applications in chemical and biosensing fields owing to their high sensitivity, ruggedness, miniaturized design and integration ability with on-field electronic systems. One of the potential advantages of using these devices are their label-free detection mechanism since mass is the fundamental property of any target analyte which is monitored by these devices. Herein, we provide a concise overview of high frequency acoustic transducers such as quartz crystal microbalance (QCM), surface acoustic wave (SAW) and film bulk acoustic resonators (FBARs) to compare their working principles, resonance frequencies, selection of piezoelectric materials for their fabrication, temperature-frequency dependency and operation in the liquid phase. The selected sensor applications of these high frequency acoustic transducers are discussed primarily focusing on the two main sensing domains, i.e., biosensing for working in liquids and gas/vapor phase sensing. Furthermore, the sensor performance of high frequency acoustic transducers in selected cases is compared with well-established analytical tools such as liquid chromatography mass spectrometry (LC-MS), gas chromatographic (GC) analysis and enzyme-linked immunosorbent assay (ELISA) methods. Finally, a general comparison of these acoustic devices is conducted to discuss their strengths, limitations, and commercial adaptability thus, to select the most suitable transducer for a particular chemical/biochemical sensing domain.

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“…[1][2][3][4] As bulk acoustic wave (BAW) devices operating in the GHz range, FBARs have attracted much attention due to their small size, high operating frequency and potential applications in high-frequency communication and mass-sensitive sensor areas. [5][6][7][8] As a kind of FBAR, solidly mounted resonators (SMRs) are composed of a piezoelectric layer sandwiched between electrodes and Bragg reector consisting of alternating high and low acoustic impedance quarter-wavelength thick dielectric or metallic layers. 9,10 The SMR, with good mechanical strength and excellent acoustic properties, and being closer to CMOS integration, was therefore chosen in this work.…”

Section: Introductionmentioning

confidence: 99%

The deposition and wet etching of Mg-doped ZnO films and their applications for solidly mounted resonators

Han

Wang

et al. 2020

RSC Adv.

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A theoretical study of the VOC sensor based on polymer-coated diaphragm embedded with FBAR

Cited by 16 publications

References 15 publications

A Film Bulk Acoustic Resonator-Based Sensor with AlN Piezoelectric Material for Detecting Ethanol and Acetone

A Film Bulk Acoustic Resonator-Based Sensor with AlN Piezoelectric Material for Detecting Ethanol and Acetone

An Overview of High Frequency Acoustic Sensors—QCMs, SAWs and FBARs—Chemical and Biochemical Applications

The deposition and wet etching of Mg-doped ZnO films and their applications for solidly mounted resonators

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