2010 IEEE International Solid-State Circuits Conference - (ISSCC) 2010
DOI: 10.1109/isscc.2010.5433900
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A thermal-diffusivity-based temperature sensor with an untrimmed inaccuracy of ±0.2°C (3s) from −55°C to 125°C

Abstract: This paper describes a temperature sensor based on the thermal diffusivity of silicon. Its digital output is insensitive to both process spread and packaging stress and is a near-linear function of absolute temperature. The sensor's accuracy is mainly limited by lithographic resolution, and so benefits from Moore's Law. A sensor fabricated in a 0.18µm CMOS process exhibits an untrimmed device-to-device inaccuracy of ±0.2°C (3σ) from -55°C to 125°C. This is significantly better than that of similar sensors fabr… Show more

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Cited by 20 publications
(16 citation statements)
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“…The phase shift of the fundamental can then be detected by synchronous detection [24]. By employing a synchronous detector as the summing node of a deltasigma modulator, a PDM can be realized with which the phase shift of the fundamental can be digitized with high resolution [32], [33].…”
Section: B Time-domain Thermal-conductivity Sensingmentioning
confidence: 99%
“…The phase shift of the fundamental can then be detected by synchronous detection [24]. By employing a synchronous detector as the summing node of a deltasigma modulator, a PDM can be realized with which the phase shift of the fundamental can be digitized with high resolution [32], [33].…”
Section: B Time-domain Thermal-conductivity Sensingmentioning
confidence: 99%
“…The ADC architecture includes sigma-delta ADC, successive approximation ADC (SAR ADC), and zoom ADC composed of SAR ADC and sigma-delta ADC. This architecture has the advantages of high measurement accuracy and wide measurement range, but it also has the disadvantages of complex structure, high power consumption [43], and low conversion rate, such that the ADC module will cost the total power of 80% [8].…”
Section: Architecture and Characteristicsmentioning
confidence: 99%
“…Usually, in NAND Flash memory, a conversion rate of more than 200 K sample/ sec does not actually affect the NAND Flash performance as it takes more than 5 µs to initialize the micro controller of NAND Flash memory. There are many temperature-sensing schemes reported in the literature [3,4,5,6,7,8,9,10,11,12]. Bandgap temperature sensors based on analog-to-digital converter (ADC) [3,4,5,6] show a relatively high level of accuracy, but they occupy a large area and have high power consumption levels.…”
Section: Introductionmentioning
confidence: 99%
“…There are many temperature-sensing schemes reported in the literature [3,4,5,6,7,8,9,10,11,12]. Bandgap temperature sensors based on analog-to-digital converter (ADC) [3,4,5,6] show a relatively high level of accuracy, but they occupy a large area and have high power consumption levels. Time domain temperature-dependent delay line-based temperature sensors [7,8,9,10] are reported.…”
Section: Introductionmentioning
confidence: 99%