A thermally-actuated latching MEMS switch matrix and driver chip for an automated distribution frame

Dellaert, Dries; Doutreloigne, Jan

doi:10.1016/j.mechatronics.2016.05.011

Cited by 10 publications

(6 citation statements)

References 9 publications

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“…As seen in Figure 7, Currano et al [31] also designed a reset actuator driven by the current to unlatch the switch, although the device size was remarkably increased. In order to achieve a more stable actuation and a facilitated driving, Dellaert et al [37] presented a thermal actuator that was heated by a polysilicon heater underneath the structure. The designed driver can generate adjustable latching waveforms, which are needed to latch the switch into a closed or open state.…”

Section: Persistent Closed Inertial Micro-switchesmentioning

confidence: 99%

Recent Advancements in Inertial Micro-Switches

et al. 2019

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Inertial micro-switches have great potential in the applications of acceleration sensing, due to the integrated advantages of a small size, high integration level, and low or even no power consumption. This paper presents an overview of the recent advancements made in research on the sensitive direction, threshold acceleration, contact effect, and threshold accuracy of inertial micro-switches. The reviewed switches were categorized according to the performance parameters, including multi-directional switches, multi-threshold switches, persistent closed switches, flexible-electrode switches, and low-g high-threshold-accuracy switches. The current challenges and prospects are also discussed.

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Section: Persistent Closed Inertial Micro-switchesmentioning

confidence: 99%

Recent Advancements in Inertial Micro-Switches

et al. 2019

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“…Since the first inertial micro-switch was reported in 1972 [ 5 ], a great number of inertial micro-switches have been developed, and they can be simply grouped into two categories: persistent switches, wherein the switch was designed with a keep-close function that can keep it closed after the acceleration event is over, and intermittent switches, wherein the switch re-opens after the acceleration dissipates. Persistent switches such as the latching switch [ 6 , 7 , 8 ], the bi-stable switch [ 9 , 10 ], and the micro-fluidic switch [ 11 , 12 ] has an excellent contact effect but usually requires an additional operation or structure to re-open itself, resulting in inconvenience for some applications wherein repeated monitoring is needed. On the other hand, the intermittent switch can sense the acceleration theoretically for an unspecified number of iterations.…”

Section: Introductionmentioning

confidence: 99%

A Low-G Silicon Inertial Micro-Switch with Enhanced Contact Effect Using Squeeze-Film Damping

Peng

Zhang

et al. 2017

Sensors

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Abstract:Contact time is one of the most important properties for inertial micro-switches. However, it is usually less than 20 µs for the switch with rigid electrode, which is difficult for the external circuit to recognize. This issue is traditionally addressed by designing the switch with a keep-close function or flexible electrode. However, the switch with keep-close function requires an additional operation to re-open itself, causing inconvenience for some applications wherein repeated monitoring is needed. The switch with a flexible electrode is usually fabricated by electroplating technology, and it is difficult to realize low-g switches (<50 g) due to inherent fabrication errors. This paper reports a contact enhancement using squeeze-film damping effect for low-g switches. A vertically driven switch with large proof mass and flexible springs was designed based on silicon micromachining, in order to achieve a damping ratio of 2 and a threshold value of 10 g. The proposed contact enhancement was investigated by theoretical and experimental studies. The results show that the damping effect can not only prolong the contact time for the dynamic acceleration load, but also reduce the contact bounce for the quasi-static acceleration load. The contact time under dynamic and quasi-static loads was 40 µs and 570 µs, respectively.

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“…In the two symmetrical arms, the outer "cold" beam does not experience Joule heating. [35]; (b) microgripper [36]; (c) switch matrix for wireless communications [37].…”

Section: Actuators With Conventional and Modified Shapesmentioning

confidence: 99%

“…In radio frequency (RF) applications, compact MEMS switches possess advantages like high linearity, power efficiency, and better high-frequency characteristics, as compared to the other switches such as diodes and transistors [55]. A thermally-actuated switch matrix for an automated signal distribution for telecommunication network applications [37] is shown in Figure 2c. The folded polysilicon heaters are separated by an air gap below the suspended metal hot arms of each actuator.…”

Section: Actuators With Conventional and Modified Shapesmentioning

confidence: 99%

Review of Electrothermal Actuators and Applications

2019

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This paper presents a review of electrothermal micro-actuators and applications. Electrothermal micro-actuators have been a significant research interest over the last two decades, and many different designs and applications have been investigated. The electrothermal actuation method offers several advantages when compared with the other types of actuation approaches based on electrostatic and piezoelectric principles. The electrothermal method offers flexibility in the choice of materials, low-cost fabrication, and large displacement capabilities. The three main configurations of electrothermal actuators are discussed: hot-and-cold-arm, chevron, and bimorph types as well as a few other unconventional actuation approaches. Within each type, trends are outlined from the basic concept and design modifications to applications which have been investigated in order to enhance the performance or to overcome the limitations of the previous designs. It provides a grasp of the actuation methodology, design, and fabrication, and the related performance and applications in cell manipulation, micro assembly, and mechanical testing of nanomaterials, Radio Frequency (RF) switches, and optical Micro-Electro-Mechanical Systems (MEMS).

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A thermally-actuated latching MEMS switch matrix and driver chip for an automated distribution frame

Cited by 10 publications

References 9 publications

Recent Advancements in Inertial Micro-Switches

Recent Advancements in Inertial Micro-Switches

A Low-G Silicon Inertial Micro-Switch with Enhanced Contact Effect Using Squeeze-Film Damping

Review of Electrothermal Actuators and Applications

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