A thin-film resistive sensor for measuring atomic hydrogen flux density

Kagadei, V. A.; Nefedtsev, E. V.; Proskurovskiĭ, D. I.; Romanenko, S. V.; Chupin, Vladimir

doi:10.1134/s0020441208010193

Cited by 1 publication

(2 citation statements)

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“…25,28 Moreover, the sensor developed in this study is versatile. Its configuration and positioning can be changed easily without any restrictions, because no intricate electrical contacts or delicate cooling systems 25,47 are required. Also the sensor can operate without a radiation shield and it is not required to stabilize or saturate the sensor before use.…”

Section: B Quantification Of the Atomic Hydrogen Fluxmentioning

confidence: 99%

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Quantification of the atomic hydrogen flux as a function of filament temperature and H2 flow rate

Ugur

Storm

Verberk

et al. 2012

Journal of Vacuum Science &Amp; Technology A: Vacuum, Surfaces, and Films

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An isothermal sensor is developed to quantify the atomic hydrogen flux on a surface, which can be located at any distance from the molecular hydrogen cracking unit. This flux is determined from the measured heat effect due to recombination of atomic hydrogen at the sensor surface. The temperature of the sensor was kept constant at 350 C to keep the heat losses constant during the measurement. Other heat flows due to radiative, conductive, and convective phenomena were quantified with targeted measurements. The design of the sensor allows ample area for the atomic hydrogen recombination reaction; thus enabling the flux values to be determined with high accuracy (errors were between 68:3 Â 10 15 and 63:3 Â 10 16 at cm À2 s À1 ). The atomic hydrogen flux, generated with a commercial atomic hydrogen source was measured as a function of the filament temperature in the range of 1400 À 1950 C and H 2 gas flow in the range of 7:44 Â 10 À6 to 7:44 Â 10 À5 mol=s (10-100 sccm). These measurements showed that the atomic hydrogen flux increases with both filament temperature and H 2 flux.

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Section: B Quantification Of the Atomic Hydrogen Fluxmentioning

confidence: 99%

“…Also the sensor can operate without a radiation shield and it is not required to stabilize or saturate the sensor before use. 25,47 Thus the sensor can be used to measure the H radical flux continuously or to track instantaneous changes within the flow.…”

Section: B Quantification Of the Atomic Hydrogen Fluxmentioning

confidence: 99%