A Three-Dimensional Finite Element Analysis Model of SAW Torque Sensor with Multilayer Structure

Li, Zhipeng; Xu, Meng; Wang, Bonan; Zhang, Chao

doi:10.3390/s22072600

Cited by 7 publications

(6 citation statements)

References 26 publications

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“…The size design and performance calculation of SAW devices are complicated. The finite element method can improve the simulation accuracy and reduce the calculation time [ 29 ]. Therefore, COMSOL Multiphysics 5.6 finite element analysis software is adopted in this study.…”

Section: Methodsmentioning

confidence: 99%

Finite Element Analysis Model of Electronic Skin Based on Surface Acoustic Wave Sensor

Jiao

Wang

et al. 2023

Nanomaterials

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In recent years, with the rapid development of flexible electronic devices, researchers have a great interest in the research of electronic skin (e-skin). Traditional e-skin, which is made of rigid integrated circuit chips, not only limits the overall flexibility, but also consumes a lot of power and poses certain security risks to the human body. In this paper, a wireless passive e-skin is designed based on the surface acoustic wave sensor (SAWS) of lithium niobate piezoelectric film. The e-skin has the advantages of small size, high precision, low power consumption, and good flexibility. With the multi-sensing function of stress, temperature, and sweat ion concentration, etc., the newly designed e-skin is a sensor platform for a wide range of external stimuli, and the measurement results can be directly presented in frequency. In order to explore the characteristic parameters and various application scenarios of the SAWS, finite element analysis is carried out using the simulation software; the relationship between the SAWS and various influencing factors is explored, and the related performance curve is obtained. These simulation results provide important reference and experimental guidance for the design and preparation of SAW e-skin.

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Section: Methodsmentioning

confidence: 99%

Finite Element Analysis Model of Electronic Skin Based on Surface Acoustic Wave Sensor

Jiao

Wang

et al. 2023

Nanomaterials

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“…Reference [8] combined the dispersion theory of aluminum plates and the design principle of IDT to design an all-around flexible circular PVDF interdigital transducer for structural health detection. Reference [9] proposed a multi-layer torque sensor for IDT/128°Y-X lithium niobate/diamond/Si (100) SAW devices and studied its performance. Reference [10] proposed a sensing method for extremely high temperatures using an Al2O3/IDT/AlN/Metal/Si composite surface acoustic wave device structure.…”

Section: Introductionmentioning

confidence: 99%

Design and Analysis of Interdigital Electrode Parallel Layout of Multilayer SAW Devices

Meng,

2024

IEEE Access

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To obtain high-frequency SAW devices, the interdigital transducer electrodes are prepared narrower and the electrode spacing is smaller, which leads to higher cost and lower reliability of highfrequency SAW devices. In this paper, two other interdigital electrode parallel layout structures are designed based on the traditional IDT flat layer layout structure, and the influence of the three different IDT electrode layout structures on the SAW device of LiNbO3/Diamond/Si multilayer structure is studied by COMSOL Multiphysics. The results show that the designed multi-layer structure SAW device can successfully excite SAW with superior performance, and the parallel layout structure of the interdigital electrode can reduce the lateral size of SAW device, which provides a new idea and direction for the miniaturization of the SAW devices.INDEX TERMS design optimization; finite element analysis (FEA); interdigital transducer (IDT); multilayer structure; surface acoustic wave (SAW)

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“…Surface acoustic wave (SAW) resonators are intensively studied and hold the promise of in situ applications of temperature [4,5], torque [6,7], strain [8,9], etc., owing to their attractive features, such as passive wireless sensing ability, simple signal processing, high sensitivity, compact size and robustness. For example, various SAW sensors with tailored designs have been utilized to measure physical quantities, including temperature [10,11], torque [12,13], strain [14,15] or chemical/biological mass loading [16,17]. The insertion loss, sensitivity and resolution of SAW sensors are closely related to the geometries of device and characteristics of material properties.…”

Section: Introductionmentioning

confidence: 99%

Modulating the Performance of the SAW Strain Sensor Based on Dual-Port Resonator Using FEM Simulation

Cheng

Yang

et al. 2023

Materials

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Surface acoustic wave (SAW) strain sensors fabricated on piezoelectric substrates have attracted considerable attention due to their attractive features such as passive wireless sensing ability, simple signal processing, high sensitivity, compact size and robustness. To meet the needs of various functioning situations, it is desirable to identify the factors that affect the performance of the SAW devices. In this work, we perform a simulation study on Rayleigh surface acoustic wave (RSAW) based on a stacked Al/LiNbO3 system. A SAW strain sensor with a dual-port resonator was modeled using multiphysics finite element model (FEM) method. While FEM has been widely used for numerical calculations of SAW devices, most of the simulation works mainly focus on SAW modes, SAW propagation characteristics and electromechanical coupling coefficients. Herein, we propose a systematic scheme via analyzing the structural parameters of SAW resonators. Evolution of RSAW eigenfrequency, insertion loss (IL), quality factor (Q) and strain transfer rate with different structural parameters are elaborated by FEM simulations. Compared with the reported experimental results, the relative errors of RSAW eigenfrequency and IL are about 3% and 16.3%, respectively, and the absolute errors are 5.8 MHz and 1.63 dB (the corresponding Vout/Vin is only 6.6%). After structural optimization, the obtained resonator Q increases by 15%, IL decreases by 34.6% and the strain transfer rate increases by 2.4%. This work provides a systematic and reliable solution for the structural optimization of dual-port SAW resonators.

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A Three-Dimensional Finite Element Analysis Model of SAW Torque Sensor with Multilayer Structure

Cited by 7 publications

References 26 publications

Finite Element Analysis Model of Electronic Skin Based on Surface Acoustic Wave Sensor

Finite Element Analysis Model of Electronic Skin Based on Surface Acoustic Wave Sensor

Design and Analysis of Interdigital Electrode Parallel Layout of Multilayer SAW Devices

Modulating the Performance of the SAW Strain Sensor Based on Dual-Port Resonator Using FEM Simulation

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