Tritium-powered betavoltaic micropower sources using contact potential difference ͑CPD͒ are demonstrated. Thermally stable scandium tritide thin films with a surface activity of 15 mCi/ cm 2 were used as the beta particle source. The electrical field created by the work function difference between the ScT film and a platinum or copper electrode was used to separate the beta-generated electrical charge carriers. Open circuit voltages of 0.5 and 0.16 V and short circuit current densities of 2.7 and 5.3 nA/ cm 2 were achieved for gaseous and solid dielectric media-based CPD cells, respectively. © 2008 American Institute of Physics. ͓DOI: 10.1063/1.2887879͔Recently, miniaturized radioisotope micropower sources have drawn significant attention because of their potential of providing a long-term energy solution for niche low-power consuming microsystems for a range of applications including exploration and surveillance. 1-6 A number of nuclear-toelectrical energy conversion integrations, which had been investigated previously, are receiving renewed attention and novel materials and modern microfabrication techniques are being introduced. 1,3 In recent years, a series of studies have been reported on betavoltaics employing semiconductor pn junction using materials such as amorphous silicon, 2 porous silicon, 4 silicon carbide, 5,6 and gallium arsenide/nitride. 1 The efficiency and longevity of these battery structures rely on high-quality pn junctions, which are often susceptible to radiation damage and lack structural self-healing resiliency.One simple method of converting the kinetic energy of ionizing radioemissions into electrical energy is to utilize a contact potential difference ͑CPD͒ device produced from materials with dissimilar work functions. An appropriate dielectric medium, in the form of a thin film, gas, or liquid, is sandwiched between the two dissimilar electrodes. An ionizing radiation source, dispersed within the dielectric medium or included in an electrode, provides the energy source for electron-ion pair generation. Charge carriers are separated by the built-in electric field, created by the contact potential difference of the electrodes, generating current in an external load. A CPD-based micropower source is relatively simple to implement and can be integrated for on-chip applications.Tritium, a radioisotope of hydrogen, is a good candidate for betavoltaic applications given its benign radiation characteristics, its relatively long half-life of 12.3 years, and availability. 2,4,7,8 Tritium is a pure beta emitter producing energetic electrons with an average energy of 5.7 keV and a maximum energy of 18.6 keV. Considering that the threshold electron energy for disruption of the silicon lattice due to knock-on collisions is 20 keV, 9 tritium decay beta particles pose little radiation damage concern for on-chip energy conversion devices. These factors make tritium an appealing power source for on-chip applications. Tritium in the gaseous form has been used in self-power lighting and in betavoltaic ...