1996
DOI: 10.1063/1.361427
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A time-resolved current method for the investigation of charging ability of insulators under electron beam irradiation

Abstract: In the present article, a convenient method for the direct measurement of the displacement current caused by electron trapping is developed to measure the trapped charge in insulators under electron beam irradiation from a scanning electron microscope. The trapping process during electron beam irradiation can be directly observed by this method. By using the conservation of current, a macroscopic formula is derived to describe our observation. The derived formula relates the measured current to the radiated be… Show more

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Cited by 64 publications
(39 citation statements)
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“…Using the published studies of samples under SEM beams [23][24][25][26] we estimate the ungrounded sample potential ∼10 kV determined by the beam energy and established in a matter of several minutes, i. -e. fast compared to our employed 10 hour stress protocol.…”
Section: Resultsmentioning
confidence: 99%
“…Using the published studies of samples under SEM beams [23][24][25][26] we estimate the ungrounded sample potential ∼10 kV determined by the beam energy and established in a matter of several minutes, i. -e. fast compared to our employed 10 hour stress protocol.…”
Section: Resultsmentioning
confidence: 99%
“…It is worth emphasizing that this experimental arrangement differs from that operated for electrets [21] and others [22,23] in two points. In one hand, the rear electrode (C) is not in contact with the insulating layer so only the electrostatic influence current I d is measured, whereas in other arrangements [21][22][23] where the insulator is in contact with the rear electrode, the radiation-induced conductivity (RIC) current, I RIC , for instance, is superimposed to I d .…”
Section: Methodsmentioning
confidence: 99%
“…), and of the influence current, I(inf.) or displacement current (Song et al 1996). To separate the two contributions, Jbara et al (2002) improved the measurement technique by the use of two rear electrodes, one not in contact with the back of the specimen, to measure the influence current, I(inf.…”
Section: Experimental Supportmentioning
confidence: 99%