2020
DOI: 10.1016/j.snb.2019.127319
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A transparent ZnO nanowire MEMS gas sensor prepared by an ITO micro-heater

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Cited by 97 publications
(54 citation statements)
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“…The study showed that the sensors exhibited a higher sensitivity to NO than other gases (C 2 H 5 OH, HCHO, H 2 S) at the optimal operating temperature of 200°C [66]. It also showed that the MEMS gas sensor with blue light illumination from the bottom of the sensors, showed that the blue light increased the carrier concentration in the ZnO nanowires [66]. The response value to 50 ppb NO gas was increased from 48.13% to 86.17% [66].…”
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confidence: 98%
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“…The study showed that the sensors exhibited a higher sensitivity to NO than other gases (C 2 H 5 OH, HCHO, H 2 S) at the optimal operating temperature of 200°C [66]. It also showed that the MEMS gas sensor with blue light illumination from the bottom of the sensors, showed that the blue light increased the carrier concentration in the ZnO nanowires [66]. The response value to 50 ppb NO gas was increased from 48.13% to 86.17% [66].…”
mentioning
confidence: 98%
“…Figure 17 shows the schematic representation of the band structure of Pd and Zn 2 SnO 4 before and after contact. The transparent ZnO nanowire MEMS gas sensor prepared by an ITO microheater was investigated and reported by Hsueh et al [66]. In that study a 3D-like heterogeneous device integrated structure using a transparent ZnO nanowire MEMS gas sensor and a blue LED was constructed [66].…”
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confidence: 99%
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