A trial of flow disturbance suppression for pneumatic anti-vibration apparatus using internal information in central pattern generator

Abstract

Pneumatic anti-vibration apparatus (AVA) has been used for suppression of vibration from floor in the field like semiconductor manufacturing. The compressed air supplied to the pneumatic AVA is generated by the air compressor. During the compression process of the air, the pressure of the compressed air varies. Consequently, the pressure variation changes the flow rate of the air supplied to the pneumatic AVA, which is called flow disturbance. Based on the internal model principle, the suppression of vibration of AVA due to flow disturbance has been confirmed by using Central Pattern Generator (CPG). Previous studies in the field of biology have confirmed the existence of a neuronal network that generates a walking rhythm in the spinal cord of an organism, and this is called CPG. Some researchers have applied CPG to such as walking of biped-robots. However, there are no applications using information inside CPG. This letter proposes using internal information in CPG as new method for further vibration suppression, compared with the conventional method. Specifically, this method makes use of outputs corresponding to differential and integral signals inside the CPG. It is shown the effectiveness of the proposed method by experimental results.

Flow disturbance attenuation for pneumatic anti-vibration apparatuses with a Sinusoidal compensator and vibration transmissibility analysis

“…used to detect the pressure fluctuation. The flow disturbance attenuation with a central pattern generator was reported in Kashiwazaki and Wakui (2017). The drawback of this approach is that parameters of the central pattern generator have to be precisely tuned so as to reduce the effects of the pressure fluctuation.…”

Flow disturbance suppression for pneumatic anti-vibration apparatus by central pattern generator using reciprocal inhibition oscillator model

“…The CPG implemented in the closed loop suppressed the vibration of the isolated table due to the flow disturbance (Kashiwazaki and Wakui, 2017a). In addition, internal information in CPG was introduced as outputs corresponding to differential and integral signals (Kashiwazaki and Wakui, 2017b). By using internal information, the stable levitation of the isolated table and the suppression of the disturbance were simultaneously realized without PI compensator which has the role of the stable levitation (Kashiwazaki and Wakui, 2019).…”