2021
DOI: 10.3390/s21186059
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A Two-Axis Piezoresistive Force Sensing Tool for Microgripping

Abstract: Force sensing has always been an important necessity in making decisions for manipulation. It becomes more appealing in the micro-scale context, especially where the surface forces become predominant. In addition, the deformations happening at the very local level are often coupled, and therefore providing multi-axis force sensing capabilities to microgripper becomes an important necessity. The manufacturing of a multi-axis instrumented microgripper comprises several levels of complexity, especially when it co… Show more

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Cited by 12 publications
(6 citation statements)
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“…Micromanipulation requires tools to accurately manipulate objects and multi-axis positioners to move the tool to an appropriate position and orientation with a sub-micrometer resolution. Various tools have been developed, such as vacuum nozzles [ 8 ], microtweezers with force sensors [ 4 , 9 ], and grippers that use capillary force [ 10 , 11 ]. Regarding the multi-axis positioner, the combination of a single-axis stage driven by linear synchronous motors with linear guides and stepping motors with ball-screw mechanisms are widely used in the industry [ 12 , 13 ].…”
Section: Introductionmentioning
confidence: 99%
“…Micromanipulation requires tools to accurately manipulate objects and multi-axis positioners to move the tool to an appropriate position and orientation with a sub-micrometer resolution. Various tools have been developed, such as vacuum nozzles [ 8 ], microtweezers with force sensors [ 4 , 9 ], and grippers that use capillary force [ 10 , 11 ]. Regarding the multi-axis positioner, the combination of a single-axis stage driven by linear synchronous motors with linear guides and stepping motors with ball-screw mechanisms are widely used in the industry [ 12 , 13 ].…”
Section: Introductionmentioning
confidence: 99%
“…Within the human body, routine physiological processes produce a variety of mechanical forces, such as intracranial pressure (ICP), intraocular pressure (IOP), and blood pressure, all of which serve as critical health indicators. Traditional hard mechanical force sensors (e.g., silicon pressure sensor), primarily rely on the piezoresistive effect, and have been extensively investigated in recent decades [ 37 , 38 , 39 , 40 , 41 , 42 , 43 , 44 , 45 , 46 , 47 , 48 , 49 , 50 , 51 , 52 , 53 , 54 ]. These force sensors have been widely used in the automotive industry, aerospace engineering, and medical instruments, due to their excellent performance and ease of mass production.…”
Section: Introductionmentioning
confidence: 99%
“…Handling, transportation, and manipulation of microparticles or bulk and granular materials can be implemented by various methods and approaches that can generally be divided into two types: prehensile and non-prehensile. Prehensile methods usually involve some sort of force or form closure that is associated with grasping by microgrippers [ 8 , 9 , 10 , 11 , 12 ]. However, prehensile methods are most suited for the manipulation of individual objects, they always involve some mechanical effect on the object to be manipulated.…”
Section: Introductionmentioning
confidence: 99%