A two-axis water-immersible micro scanning mirror using hybrid polymer and elastomer hinges

Duan, Xiaoyu; Li, Shuangliang; Medellin, Anthony; Ma, Chao; Zou, Jun

doi:10.1016/j.sna.2020.112108

Cited by 7 publications

(5 citation statements)

References 12 publications

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“…Currently the water-immersible scanning mirrors are based on the gimbal design, where the mirror plate is supported by a pair of torsional hinges and tilts around its center axis. The torsional hinges are usually made of flexible and high-strength polymer materials to avoid damage from turbulence in water [17][18][19]. To address this issue, this paper reports a new design for the water-immersible scanning mirror that utilizes hybrid polymer and elastomer hinges.…”

Section: Introductionmentioning

confidence: 99%

A water-immersible scanning mirror with hybrid polymer and elastomer hinges for high-speed and wide-field 3D ultrasound imaging

Li,

Dong,

Song

et al. 2024

MOEMS and Miniaturized Systems XXIII

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This paper reports a new water-immersible single-axis scanning mirror using hybrid polymer and elastomer hinges to achieve both high scanning resonance frequencies and large tilting angles for high-speed and wide-field 3D ultrasound imaging. To demonstrate the concept, a prototype scanning mirror is designed, fabricated, and characterized. The fast-and slow-scanning were achieved by integrating stiff BoPET (biaxially oriented polyethylene terephthalate) and soft elastomer PDMS (Polydimethylsiloxane) hinges, respectively. The testing results have shown a resonance frequency of 270 𝐻𝑧 for the BoPET hinges and a resonance frequency of 10 𝐻𝑧 for the PDMS hinges when the scanning mirror was immersed in water. 3D ultrasound imaging is demonstrated by combining the fast-and slow-scanning together to provide both an augmented field of view (FoV) and high local imaging volume rate.

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Section: Introductionmentioning

confidence: 99%

A water-immersible scanning mirror with hybrid polymer and elastomer hinges for high-speed and wide-field 3D ultrasound imaging

Li,

Dong,

Song

et al. 2024

MOEMS and Miniaturized Systems XXIII

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“…They are widely used in the fields of laser projection [5], LIDAR [6], optical communication [7], and optical switching [8], where MEMS mirrors are mostly driven in air or a vacuum. Liquid-immersible MEMS mirrors have been developed for many applications, such as photoacoustic imaging [9], fluidic packaging [10], ultrasound imaging [11], etc. In photoacoustic imaging, MEMS mirrors are used to co-scan the ultrasound and optical beams to obtain the image.…”

Section: Introductionmentioning

confidence: 99%

“…The blood vessels of a human hand were reconstructed by the MEMS-based photoacoustic imaging system [13]. Duan et al prepared a waterproof MEMS mirror using BoPET (biaxially oriented polyethylene terephthalate) and EN (elastomer nanocomposite) with a mirror size of 5 × 3 mm 2 [11]. The mirror was driven by four permanent magnets.…”

Section: Introductionmentioning

confidence: 99%

Water-Immersible MEMS Mirror with a Large Optical Aperture

Yang,

Liu,

et al. 2024

Micromachines

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This paper presents a two-axis AlScN-based water-immersible MEMS mirror fabricated in an 8-inch MEMS process. Compared with other studies, this device has a larger optical aperture 10 mm in diameter. The resonant frequencies of the device are 1011 Hz in air and 342 Hz in water. The scanning angle reaches ±5° and ±2° at resonant frequencies in air and water, respectively. The cavitation phenomenon is observed when the device is operating in water, which leads the device to electrical failure. To address this issue, a device with reduced resonant frequencies—246 Hz and 152 Hz in air and water—is characterized, through which the bubbles can be effectively prohibited. This MEMS mirror could potentially be used in ultrasound and photoacoustic microscopy applications.

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“…Several more compact designs use two-axis MEMS mirror scanners [39] , [40] , [41] , [42] or two-axis galvanometer scanners [43] , [44] , [45] , which, however, have achieved a B-scan frame rate of only 35–50 Hz. Two-axis MEMS scanning mirrors with torsional hinges were developed with a B-scan frame rate of > 150 Hz [46] , [47] . However, one drawback of the torsion hinge is that the resonance frequency of the slow-axis torsional hinge is larger than 30 Hz, leading to a very limited number of B-scans per volumetric image and thus a small FOV.…”

Section: Introductionmentioning

confidence: 99%

“…However, one drawback of the torsion hinge is that the resonance frequency of the slow-axis torsional hinge is larger than 30 Hz, leading to a very limited number of B-scans per volumetric image and thus a small FOV. A possible solution is to reduce the tensile stiffness of the slow-axis material [47] , which limits the size of mirror plate due to weight-bearing. Another drawback of the torsion hinge is the much-reduced scanning range when operating at off-resonance frequencies.…”

Section: Introductionmentioning

confidence: 99%

High-speed functional photoacoustic microscopy using a water-immersible two-axis torsion-bending scanner

et al. 2021

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Optical-resolution photoacoustic microscopy (OR-PAM) can provide functional, anatomical, and molecular images at micrometer level resolution with an imaging depth of less than 1 mm in tissue. However, the imaging speed of traditional OR-PAM is often low due to the point-by-point mechanical scanning and cannot capture time-sensitive dynamic information. In this work, we demonstrate a recent effort in improving the imaging speed of OR-PAM, using a newly developed water-immersible two-axis scanner. Driven by water-compatible electromagnetic actuation force, the new scanning mirror employs a novel torsion-bending mechanism to achieve fast 2D scanning. The torsion scanning along the fast-axis works in the resonant model, and the bending scanning along the slow-axis operate at the quasi-static mode. The scanning speed and scanning range along the two axes can be independently adjusted. Steered by the two-axis torsion-bending scanning mirror immersed in water, the focused excitation light and the generated acoustic wave can be confocally aligned over the entire imaging area. Thus, a high imaging speed can be achieved without sacrificing the detection sensitivity. Equipped with the torsion-bending scanner, the high-speed OR-PAM system has achieved a cross-sectional frame rate of 400 Hz, and a volumetric imaging speed of 1 Hz over a field of view of 1.5 × 2.5 mm 2 . We have also demonstrated high-speed OR-PAM of the hemodynamic changes in response to pharmaceutical and physiological challenges in small animal models in vivo. We expect the torsion-bending scanner based OR-PAM will find matched biomedical studies of tissue dynamics.

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A two-axis water-immersible micro scanning mirror using hybrid polymer and elastomer hinges

Cited by 7 publications

References 12 publications

A water-immersible scanning mirror with hybrid polymer and elastomer hinges for high-speed and wide-field 3D ultrasound imaging

A water-immersible scanning mirror with hybrid polymer and elastomer hinges for high-speed and wide-field 3D ultrasound imaging

Water-Immersible MEMS Mirror with a Large Optical Aperture

High-speed functional photoacoustic microscopy using a water-immersible two-axis torsion-bending scanner

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