A Two-Step Fabrication Method for 3D Printed Microactuators: Characterization and Actuated Mechanisms

Kim, Suk-Jun; Velez, Camilo; Pierre, Ryan St.; Smith, Gabriel L.; Bergbreiter, Sarah

doi:10.1109/jmems.2020.2992367

Cited by 27 publications

(20 citation statements)

References 43 publications

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“…Two-photon polymerization (TPP) lithography, which is induced by a femtosecond laser, with a resolution of less than 100 nm, is a three-dimensional (3D) microprinting technology. Applications have included metamaterials 17 – 19 , MEMS 20 – 22 , microfluidic devices 23 – 25 , and biomedicine 26 – 28 . Ideally, this TPP technology can be used to fabricate micro/nanometer structures of any shape.…”

Section: Introductionmentioning

confidence: 99%

Fiber-tip polymer clamped-beam probe for high-sensitivity nanoforce measurements

et al. 2021

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Micromanipulation and biological, material science, and medical applications often require to control or measure the forces asserted on small objects. Here, we demonstrate for the first time the microprinting of a novel fiber-tip-polymer clamped-beam probe micro-force sensor for the examination of biological samples. The proposed sensor consists of two bases, a clamped beam, and a force-sensing probe, which were developed using a femtosecond-laser-induced two-photon polymerization (TPP) technique. Based on the finite element method (FEM), the static performance of the structure was simulated to provide the basis for the structural design. A miniature all-fiber micro-force sensor of this type exhibited an ultrahigh force sensitivity of 1.51 nm μN−1, a detection limit of 54.9 nN, and an unambiguous sensor measurement range of ~2.9 mN. The Young’s modulus of polydimethylsiloxane, a butterfly feeler, and human hair were successfully measured with the proposed sensor. To the best of our knowledge, this fiber sensor has the smallest force-detection limit in direct contact mode reported to date, comparable to that of an atomic force microscope (AFM). This approach opens new avenues towards the realization of small-footprint AFMs that could be easily adapted for use in outside specialized laboratories. As such, we believe that this device will be beneficial for high-precision biomedical and material science examination, and the proposed fabrication method provides a new route for the next generation of research on complex fiber-integrated polymer devices.

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Section: Introductionmentioning

confidence: 99%

Fiber-tip polymer clamped-beam probe for high-sensitivity nanoforce measurements

et al. 2021

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“…Microscale thermal and electrostatic actuators were fabricated using TPP 3D printing (IP-S negative photoresist) and aluminum sputtering, which eliminates the need for additional steps to electrically isolate the actuators from the substrate 171 . Sidewall coverage was used to make an electrostatic actuator with interdigitated comb structures.…”

Section: Methodsmentioning

confidence: 99%

3D-printed microrobots from design to translation

et al. 2022

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Microrobots have attracted the attention of scientists owing to their unique features to accomplish tasks in hard-to-reach sites in the human body. Microrobots can be precisely actuated and maneuvered individually or in a swarm for cargo delivery, sampling, surgery, and imaging applications. In addition, microrobots have found applications in the environmental sector (e.g., water treatment). Besides, recent advancements of three-dimensional (3D) printers have enabled the high-resolution fabrication of microrobots with a faster design-production turnaround time for users with limited micromanufacturing skills. Here, the latest end applications of 3D printed microrobots are reviewed (ranging from environmental to biomedical applications) along with a brief discussion over the feasible actuation methods (e.g., on- and off-board), and practical 3D printing technologies for microrobot fabrication. In addition, as a future perspective, we discussed the potential advantages of integration of microrobots with smart materials, and conceivable benefits of implementation of artificial intelligence (AI), as well as physical intelligence (PI). Moreover, in order to facilitate bench-to-bedside translation of microrobots, current challenges impeding clinical translation of microrobots are elaborated, including entry obstacles (e.g., immune system attacks) and cumbersome standard test procedures to ensure biocompatibility.

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“…A similar approach was recently also independently developed by Kim et al to prepare a voltage-driven micro-actuators. 11 The transducer was fabricated on a circular glass slide. The sample, after being cleaned with isopropanol (IPA) and rinsed with deionized water, was covered with a nanometric layer of indium tin oxide (ITO), through a sputtering procedure.…”

Section: Design Implementationmentioning

confidence: 99%

Two-step MEMS microfabrication via 3D direct laser lithography

Tricinci

Carlotti

Desii

et al. 2021

Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XIV

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Micro/nano electro-mechanical systems (MEMS/NEMS) are constantly attracting an increasing attention for their relevant technological applications in fields ranging from biology, medicine, ecology, energy to industry. Most of the performances of micro-nanostructured devices rely on both the design and the intrinsic properties of the constituent materials that are processed at such dimensional scale. For this reason, spatial precision, resolution and reproducibility are crucial factors in the micro-fabrication procedure. 3D direct laser lithography (DLL), based on multiphoton absorption, allows to realize outstanding three-dimensional structures with nanoscale features. This technique has recently emerged as a powerful tool for fabricating 3D micro-patterned surfaces for optics, photonics, as well as for bioinspired cell culture scaffold. We propose a method for a two-step fabrication of micro/nanostructured multicomponent systems to be employed as transductors, by means of the integration of 3D DLL and shadowing effects in metal deposition. A z-axis accelerometer is the proof-of-concept for the validation of the proposed transductor. The former is composed of a cantilever patterned with conductive paths which act as a strain gauge. Mechanical stimulation deforms the cantilever and, accordingly, varies its conductive properties. The fabrication of the conductive components is performed using the vacuum evaporation of gold, a traditional microfabrication technique, and exploiting the shadowing effect due to peculiar microstructures on the cantilever.

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A Two-Step Fabrication Method for 3D Printed Microactuators: Characterization and Actuated Mechanisms

Cited by 27 publications

References 43 publications

Fiber-tip polymer clamped-beam probe for high-sensitivity nanoforce measurements

Fiber-tip polymer clamped-beam probe for high-sensitivity nanoforce measurements

3D-printed microrobots from design to translation

Two-step MEMS microfabrication via 3D direct laser lithography

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