A Unified Series of High-Precision Pressure Sensors for Automatic Regulation and Monitoring Systems

Mokrov, E. A.; Belozubov, E. M.; Semenov, V. A.

doi:10.1023/b:mete.0000038113.43002.30

Cited by 1 publication

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“…As a reference, the contact stress information often illustrates and reflects operational conditions of the devices under test [1]. Nowadays the application range of contact stress sensors has spread into more fields such as automatic control, mechanical manufacturing, and biological medicine etcetera [2] [3].…”

Section: Introductionmentioning

confidence: 99%

Mechanical simulation and test of force-sensitive element in surface acoustic wave contact stress sensor

Ding

Zhang

et al. 2015

2015 IEEE International Conference on Mechatronics and Automation (ICMA)

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In some harsh environments such as thin slits, the contact stress measurement with passive and wireless method faces huge challenges. In this paper a contact stress sensing system based on surface acoustic wave resonator (SAWR) is schemed, and the force-sensitivity element based on diaphragm structure is constructed. To meet the requirements in slits, the overall thickness of the device is limited under 400 μm. Moreover, the force-sensitive element with three parameters including shape, width and thickness of the cavity are built and simulated in FEA software (COMSOL Multiphysics). And the stress and strain results are discussed so as to determine proper parameters of sensor. Finally, the particular sensor based on circular diaphragm is manufactured and tested. The loading test results in 0-4MPa show that the sensor has a good linearity, and the sensitivity is 20.5 kHz/MPa. Therefore, this approach is proved to be feasible to monitor the contact stress in slits, which provides a novel method for physical quantity measurements in harsh environments as well. Index Terms -contact stress; surface acoustic wave resonator; force-sensitive element; diaphragm

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Section: Introductionmentioning

confidence: 99%