2021
DOI: 10.1007/s10845-021-01810-2
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A variational autoencoder for a semiconductor fault detection model robust to process drift due to incomplete maintenance

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Cited by 15 publications
(5 citation statements)
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“…The encoder is trained to return a mean and variance given the input, so detecting outliers (or changes in the distribution) is straightforward. These methods are used in multiple scenarios, such as social media sentiment analysis [231,163], detecting drift in videos [199] and fault detection [102].…”
Section: Data Distribution-based Approachmentioning
confidence: 99%
“…The encoder is trained to return a mean and variance given the input, so detecting outliers (or changes in the distribution) is straightforward. These methods are used in multiple scenarios, such as social media sentiment analysis [231,163], detecting drift in videos [199] and fault detection [102].…”
Section: Data Distribution-based Approachmentioning
confidence: 99%
“…Costa et al [ 26 ] proposed a semi-supervised recurrent variational autoencoder (RVAE) method to effectively address the diagnosis of atrial fibrillation (AF). Kim et al [ 27 ] presented a fault diagnosis model to robustly process drift by modeling process drift with a variational autoencoder (VAE). Zhang et al [ 28 ] presented a semi-supervised learning framework for bearing fault diagnosis using variational autoencoder (VAE)-based deep generative models.…”
Section: Theoretical Backgroundmentioning
confidence: 99%
“…For example, Kim et al utilized a variational AE model to detect semiconductor faults characterized by time‐varying process drift. [ 19 ] In a separate study, Tian et al employed Bayesian inference in conjunction with an AE to estimate and calibrate sensor drift bias caused by high thermal density, thereby achieving optimal control in a data center cooling system. [ 20 ] Moreover, Mirzaei et al utilized sparse AE‐based transfer learning to estimate hydrogen gas concentration and address the data distribution shift problem arising from instrumental variation.…”
Section: Introductionmentioning
confidence: 99%
“…[18] Although some researchers have attempted to mitigate sensor baseline drifting through the use of machine learning approaches, the investigation and validation of solutions specifically tailored for long-term sensor usage drift (over one hour) remain unexplored. Drawing inspiration from the successful application of unsupervised learning methods, such as autoencoder (AE), [19][20][21] in detecting sensor faults, there have been notable instances where unsupervised learning methods have been employed to address the drift detection problem. For example, Kim et al utilized a variational AE model to detect semiconductor faults characterized by time-varying process drift.…”
Section: Introductionmentioning
confidence: 99%
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