A vertically integrated media-isolated absolute pressure sensor

Goldman, Ken; Gritt, G.; Baskett, I.; Czarnocki, W.; Ramí­rez, A.; Brown, C. R.; Hughes, D. E.; Wallace, Dennis; Shah, M.

doi:10.1016/s0924-4247(97)01765-2

Cited by 3 publications

(2 citation statements)

References 2 publications

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“…Some proposed applications include: accelerometers (Shemansky et al 1995;Davis et al 2006), pressure sensors (Goldman et al 1998), optical micromirrors (Dudley 2004), drug delivery systems (Gooray et al 2002) and passive and active radio frequency (RF) electrical components (Chapman 2006).…”

Section: Introductionmentioning

confidence: 99%

A Monte-Carlo simulation of the effect of surface morphology on the fracture of nanobeams

Alan

Zehnder

2007

Int J Fract

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Experiments show that the strength of nanostructures can be very high and that strength statistics are dominated by surface flaws. To understand the dependence of strength on the surface morphology, a series of fracture mechanics based Monte-Carlo simulations were performed. The surfaces of previously tested Si nanobeams were measured, statistically characterized and equivalent surfaces were generated. The surface profiles consist of bunched steps with varying heights and widths. At the root of each step, there is a stress singularity defined by a stress intensity factor. The beams were assumed to fail when the stress intensity factor anywhere on the surface exceeds the fracture toughness. In agreement with experiments, simulations show that even a small increase in the surface roughness results in a significant reduction in the strength of nanostructures. Thus, careful attention to the surfaces is essential for optimum strength and reliability at the nanoscale.

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Section: Introductionmentioning

confidence: 99%

A Monte-Carlo simulation of the effect of surface morphology on the fracture of nanobeams

Alan

Zehnder

2007

Int J Fract

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“…Environmental effects such as drift due to moisture or liquid have previously been solved by using silicone oil as a protective, pressure transferring, media or by an encapsulation of the piezoresistors using a protective coating of materials such as Si 3 N 4 , TEOS, SiO 2 or polymer [11]. Silicone oil is typically integrated during packaging whereas a protective coating could be batch fabricated and is therefore more suitable for ultraminiaturized sensors [9,12].…”

Section: Introductionmentioning

confidence: 99%

Media protected surface micromachined leverage beam pressure sensor

Melvås

Kälvesten

Stemme

2001

J. Micromech. Microeng.

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In this paper we present the first surface micromachined ultraminiaturized, highly sensitive, pressure sensor that utilizes a force-transducing beam and a 2 µm thick polysilicon pressure sensing diaphragm as an encapsulation layer for high media isolation of the sensing piezoresistor. A beam is attached to the diaphragm at one end and to the cavity at the other end. The pressure-induced diaphragm deflection is transduced to strain in the beam and sensed by a piezoresistive strain-gauge on the beam. The piezoresistor is thus well isolated from the sensing environment. The pressure sensing performance was measured to 0.9 µV V −1 mmHg −1 .

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