A Very Simple Closed-Form Expression for Pull-In Voltage and Fundamental Frequency of Fixed-Fixed Beam

Razeghi-Harikandeei, Alieh; Ganji, Bahram Azizollah; Jafari-Talookolaei, Ramazan-Ali; Koohsorkhi, Javad; Abdipour, Abdolali

doi:10.1109/jsen.2020.2979023

Cited by 1 publication

(2 citation statements)

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“…x and k ′ y can be obtained by the spring constant of the four-beam design, as shown in equation (9). The spring constant of the seven-shaped beam is proportional to the thickness t, proportional to the cube of the width w 3 , and inversely proportional to the cube of the length L 3 .…”

Section: Comparison With Other Beamsmentioning

confidence: 99%

“…At present, many studies are focused on connecting beams, which can be roughly divided into four types, clamped-clamped * Author to whom any correspondence should be addressed. beam (also called fixed-fixed beam) [2,3], folded beam [4,5], serpentine beam [6][7][8][9][10][11] and crab-leg beam (also called L-shaped beam) [12][13][14][15][16][17]. These four types of spring beams have their own advantages and disadvantages in specific applications [18].…”

Section: Introductionmentioning

confidence: 99%

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Seven-shaped beam design for improving the sensitivity of two-dimensional MEMS sensors

Zhou,

Liu,

Cui

et al. 2023

J. Micromech. Microeng.

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The spring constant of the connecting beam is one of the most crucial factors that affect the detection sensitivity of MEMS sensors. Existing researches reduce the spring constant by changing the parameters or number of connecting beams. In this paper, we propose a seven-shaped beam structure to modify the spring constant of MEMS sensors. The acute angle between the two segments of seven-shaped structure lowers spring constant. Compared with the crab-leg beam, it can bring a maximum sensitivity gain of 1.29 times through different angle designs. At the same time, compared with those combined beams, seven-shaped combined beams can bring a maximum sensitivity gain of 1.6 times. The two-dimensional MEMS sensor with seven-shaped beam has been designed and fabricated. According to the experimental results, the sensor reached a detection sensitivity of 25 fF/g. The relative error of the differential capacitance change between the measurement result and the simulation result is only 8.6%.

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Section: Comparison With Other Beamsmentioning

confidence: 99%