A vibratory micromechanical gyroscope

Boxenhorn, Burton; Greiff, Paul

doi:10.2514/6.1988-4177

Cited by 39 publications

(13 citation statements)

References 3 publications

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“…Microresonators have been used in several applications such as mass sensing [ 1 ], micropumps [ 2 ], gas sensors [ 3 ], gyroscopes [ 4 ] and accelerometers [ 5 ]. These microsystems are commonly fabricated with an initial deflection due to the mechanical stress caused by the fabrication process.…”

Section: Introductionmentioning

confidence: 99%

Investigations of the Effects of Geometric Imperfections on the Nonlinear Static and Dynamic Behavior of Capacitive Micomachined Ultrasonic Transducers

2018

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In order to investigate the effects of geometric imperfections on the static and dynamic behavior of capacitive micomachined ultrasonic transducers (CMUTs), the governing equations of motion of a circular microplate with initial defection have been derived using the von Kármán plate theory while taking into account the mechanical and electrostatic nonlinearities. The partial differential equations are discretized using the differential quadrature method (DQM) and the resulting coupled nonlinear ordinary differential equations (ODEs) are solved using the harmonic balance method (HBM) coupled with the asymptotic numerical method (ANM). It is shown that the initial deflection has an impact on the static behavior of the CMUT by increasing its pull-in voltage up to 45%. Moreover, the dynamic behavior is affected by the initial deflection, enabling an increase in the resonance frequencies and the bistability domain and leading to a change of the frequency response from softening to hardening. This model allows MEMS designers to predict the nonlinear behavior of imperfect CMUT and tune its bifurcation topology in order to enhance its performances in terms of bandwidth and generated acoustic power while driving the microplate up to 80% beyond its critical amplitude.

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Section: Introductionmentioning

confidence: 99%

Investigations of the Effects of Geometric Imperfections on the Nonlinear Static and Dynamic Behavior of Capacitive Micomachined Ultrasonic Transducers

2018

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“…Capacitive resonators have been the subject of extensive research for the last decades. This interest has led to many applications such as MEMS accelerometers and gyroscopes [1][2][3][4], pressure sensor [5], mass sensors [6][7][8] and radio frequency antennas [9].…”

Section: Introductionmentioning

confidence: 99%

Effects of Squeeze Film and Initial Deflection on the Resonance Frequencies and Modal Damping of Circular Microplates

Jallouli

Kacem

Lardiès

2018

Volume 4: 23rd Design for Manufacturing and the Life Cycle Conference; 12th International Conference on Micro- And Nanosystems

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We investigate the effects of squeeze air film and initial deflection on the resonance frequencies and modal damping of capacitive circular microplates. The equation of motion of a circular microplate, which are derived from the von kármán plate theory, coupled with the Reynolds equation are discretized using the Differential Quadrature Method (DQM). The eigenvalues and eigenvectors of the multiphysical problem are determined by perturbing the system of equations around a static solution. Therefore, the resonance frequencies, modal damping coefficients and mode shapes of the plate and the fluid can be determined. The advantage of using DQM is that the solution of the system can be obtained with only few grid points. The obtained numerical results are compared with the experimental data for the case of a capacitive circular microplates with an initial deflection. The increase of the static pressure leads to a shift in the resonance frequencies due to the increase in the stiffness of the plate. Also the initial deflection change the resonance frequencies due to the change in the effective gap distance. The developed model is an effective tool to predict the dynamic behavior of a microsystem under the effect of air film and with initial deflection.

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“…Prior to the silicon MEMS TFG, Systron Donner developed the quartz angular rate sensor [4] which is still being refined and used for tactical applications. In 1984, Draper began working the double gimbal gyro [5]. After rudimentary demonstrations, this impractical gyro transitioned into the tuning fork gyro.…”

Section: Introductionmentioning

confidence: 99%

How to invent (or not invent) the first silicon MEMS gyroscope

Weinberg

2015

2015 IEEE International Symposium on Inertial Sensors and Systems (ISISS) Proceedings

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Draper designed and constructed traditional mechanical gyroscopes for Apollo and for strategic guidance systems. In 1984, Draper started the double gimbal gyro, which led to the silicon-on-glass tuning fork gyroscope that reported the first useful performance of a silicon MEMS gyroscope in 1992. This work became the basis for the successful Honeywell MEMS inertial measurement units and the starting point for other MEMS angular rate sensors.This paper will discuss considerations that were factored into the first tuning fork. These known factors included the thin, available proof masses, efficient mass use, quadrature stiffness, fluid gas "surf boarding", noise sources, frequency variation, and modal response. Unconsidered phenomena, such as glass charging, stiffness non-linearity, comb drive cross-coupling and electrical feed through, were designed around on the fly. Other fortuitous events such as material and parameter selection which avoided thermoelastic damping, which was not understood in MEMS until 2003, the limits of quadrature trimming, and the addition of key personnel, will be covered.In summary, demonstrating the first silicon MEMS gyroscope required wellapplied engineering and a bit of serendipity.

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A vibratory micromechanical gyroscope

Cited by 39 publications

References 3 publications

Investigations of the Effects of Geometric Imperfections on the Nonlinear Static and Dynamic Behavior of Capacitive Micomachined Ultrasonic Transducers

Investigations of the Effects of Geometric Imperfections on the Nonlinear Static and Dynamic Behavior of Capacitive Micomachined Ultrasonic Transducers

Effects of Squeeze Film and Initial Deflection on the Resonance Frequencies and Modal Damping of Circular Microplates

How to invent (or not invent) the first silicon MEMS gyroscope

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