A Virtual Accelerometer Array Using One Device Based on Time Domain Measurement

Li, Enfu; Shen, Qiang; Hao, Yongcun; Chang, Honglong

doi:10.1109/jsen.2019.2911984

Cited by 7 publications

(18 citation statements)

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“…For the time domain sensor, the measurement range can be expressed as a max = ω 2 (A − d 0 ) [30]. Combining this with the resolution expression ∆a ∝ Aω 3 ∆t (Equation ( 3)), we can conclude that when the vibration amplitude and resonant frequency vary, both the measurement range and resolution vary.…”

Section: Dependence Of the Acceleration Resolution On The Vibration A...mentioning

confidence: 99%

“…For a forced vibration of a mass-spring-damper single-freedom system, when an acceleration perturbation a is applied, the center position of the oscillation trajectory of the proof mass shifts a displacement d, d = a/ω 2 0 [30]. Therefore, when the acceleration perturbations, −1 g and +1 g, are applied, the shifted displacement of the center position can be expressed as:…”

Section: Detection Circuit Of the Oscillation Trajectory Of The Proof...mentioning

confidence: 99%

“…pling datum numbered ( ) The performance of the time domain accelerometer was evaluated via the standard deviation (1σ) of the measured acceleration values [30]. Different time-measurement accuracies were achieved by sampling rate.…”

Section: Time Intervals Measurement Based On Data Post-processingmentioning

confidence: 99%

“…The analog signal of the sensor was sampled with different sampling rates for 3.2 s. The DRPs were set as 0 nm and 130 nm. Using the data post-processing method [30], the solved acceleration is shown in Figure 19. The 1σ noises of the solved acceleration were 6.23 mg, 7.07 mg, 12.07 mg, 24.6 mg at the time-measurement accuracies of 4 × 10 −7 s, 8 × 10 −7 s, 2 × 10 −6 s, 4 × 10 −6 s. When the time-measurement accuracies were equal to or lower than 8 × 10 −7 s (≥8 × 10 −7 s), the measured 1σ noises were almost proportional to the time-measurement accuracies (Figure 20).…”

Section: Time Intervals Measurement Based On Data Post-processingmentioning

confidence: 99%

“…In our previous works, several novel characteristics of time domain accelerometers have been identified and verified utilizing a self-developed sensor based on a standard silicon-on-insulator process. First, a virtual time domain accelerometer array using a single device was built [30]. Multiple acceleration measurements could be simultaneously performed using the built virtual time domain sensor array.…”

Section: Introductionmentioning

confidence: 99%

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Top-Down Design Method of a Time Domain Accelerometer with Adjustable Resolution

Li,

Jian

2024

Micromachines

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A top-down design methodology and implementation of a time domain sensor is presented in this paper. The acceleration resolution of the time domain sensor is equal to the time-measurement accuracy divided by the sensor sensitivity. Combined with the sensitivity formula, the acceleration resolution is proportional to the vibration amplitude, the time-measurement accuracy, and the third power of the resonant frequency. According to the available time-measurement accuracy and the desired acceleration resolution, the parameters including the vibration amplitude and the resonant frequency were theoretically calculated. The geometrical configuration of the time domain sensor device was designed based on the calculated parameters. Then, the designed device was fabricated based on a standard silicon-on-insulator process and a matched interface circuit was developed for the fabricated device. Experimental results demonstrated that the design methodology is effective and feasible. Moreover, the implemented sensor works well. In addition, the acceleration resolution can be tuned by adjusting the time-measurement accuracy and the vibration amplitude. All the reported results of this work can be expanded to other time domain inertial sensors, e.g., a gyroscope or tilt sensor.

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Section: Dependence Of the Acceleration Resolution On The Vibration A...mentioning

confidence: 99%

Section: Detection Circuit Of the Oscillation Trajectory Of The Proof...mentioning

confidence: 99%

Section: Time Intervals Measurement Based On Data Post-processingmentioning

confidence: 99%

Section: Time Intervals Measurement Based On Data Post-processingmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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