A walking type piezoelectric actuator with two umbrella-shaped flexure mechanisms

Abstract

A walking type piezoelectric actuator with two umbrella-shaped flexure mechanisms is proposed to reduce the backward motion. By utilizing two umbrella-shaped flexure mechanisms which could be treated as two 'legs', the 'walking' motion is accomplished. The structure and motion principle are described; Finite Element Method (FEM) is exploited to explore the static and modal performances of the umbrella-shaped flexure mechanism. Moreover, experiments have been carried out to investigate the working performance of the proposed walking type piezoelectric actuator. Results show that the walking type piezoelectric actuator with umbrella-shaped flexure mechanisms could achieve the 'walking' motion and reduce the backward motion. Additionally, the phase difference between two input signals U 1 and U 2 greatly influences the working performance. In the case of the phase difference Φ = 95 • , the backward rate of the slider is able to achieve the minimum 0%; the minimum stepping displacement is 0.3 µm when the frequency f = 1 Hz; the maximum motion speed of the slider is up to 1132 µm s −1 when the input frequency f = 400 Hz and the input voltage U = 120 V; the maximum output force is 700 g while the input voltage U = 120 V and frequency f = 1 Hz.

Design and performance of a compact stick-slip type piezoelectric actuator based on right triangle flexible stator

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Design, analysis, and experimental study on a novel inertial piezoelectric actuator with double-stator cooperative motion

“…Due to the superior performance of the inertia piezoelectric actuator, more and more researchers have paid attention in recent years. Some inertia piezoelectric actuators with flexible-hinges have been widely developed, such as ''Parallelogram type'' (Li et al, 2015), ''Z type'' (Li et al, 2018), ''Bridge type'' (Li et al, 2017), and ''Umbrella type'' (Li et al, 2020). Some scholars have also conducted investigations on the driving and control methods of the inertia piezoelectric actuator to improve its performance and phenomenon of backward motion.…”

Investigation on a novel bellows-type piezo-hydraulic actuator

“…Active shape control of structure using piezoelectric actuator has attracted wide attention [12]. Piezoelectric actuator uses inverse piezoelectric effect to convert alternating voltage into mechanical deformation for work [13,14]. Piezoelectric stack actuator is a typical piezoelectric actuator, which is widely used in the deformation adjustment.…”

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