Field experiments were conducted from 2008 to 2010 in the Weibei Highlands of China to study the effects of straw incorporation on soil moisture, evapotranspiration (ET), and rainfall-use efficiency (RUE) of maize (Zea mays L.) under semiarid conditions in dark loessial soil. The straw application rates were at low straw ([LS] 4.5 t ha -1 ), medium straw ([MS] 9 t ha -1 ), and high straw ([HS] 13.5 t ha -1 ) rates combined with fixed levels of chemical fertilizers compared with only chemical fertilizers. Straw incorporation significantly increased surface soil moisture at the grain filling stage of maize and significantly improved RUE in the whole growth period of maize. Evapotransipiration at the ten leaf collar to tasseling and the grain filling to maturity stages of maize were significantly increased by straw incorporation. However, ET at the tasseling to grain filling stage of maize was significantly reduced by straw incorporation. Medium straw and HS treatments significantly improved surface soil moisture at the tasseling stage of maize and RUE at the five leaf collar to maturity stage of maize. Increasing straw application rates significantly reduced ET at the grain filling to maturity stage of maize. With increasing experimental years, LS treatment significantly improved surface soil moisture at the five leaf collar to tasseling stage of maize and RUE at the five and ten leaf collar stage of maize, MS treatment significantly increased surface soil moisture at the five and ten leaf collar stages of maize, and HS treatment significantly reduced ET at the sowing to five leaf collar stage of maize. We conclude that a reasonable combination application of straw and chemical fertilizers could make full use of surface soil moisture, inhibit soil evaporation, reduce the ineffective evaporation of crop, and increase RUE at a different growth period of maize and grain yield. In this experiment, the optimum straw application rate for improving RUE and grain yield was MS treatment.