An improved wideband cavity-backed antenna and a planar phased array with wideband wide-angle impedance matching (WAIM) are provided in this paper. A step-shaped cavity is applied in the antenna, so the relative bandwidth of VSWR < 2 can be improved to more than 52% without increasing the cavity profile. Furthermore, a planar phased array constructed by the cavity-backed antenna can work with a wide-angle scanning range of ±60 • at both Eand H-planes. Due to the wideangle scanning range, the impedance matching for the phased array will be unstable in the required wideband. Consequently, the matching layer with metamaterials has been loaded on the phased array. The VSWR is controlled within 2 in E-plane and 3.5 in H-plane during the scanning range of ±60 • in wide bandwidth.