A Y type SAW mass sensor with metal array reflectors

Yang, Ying; Zhu, Ding

doi:10.1016/j.snb.2004.12.056

Cited by 6 publications

(4 citation statements)

References 6 publications

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“…Moreover, the K 2 increases with increasing t AlN —i.e., the SAW device would have better performance with thicker AlN coatings. However, with further increase of the t AlN , the AlN coatings would have negative effects on the properties of the LGS SAW devices due to mass effect, leading to reduction of the resonance strength of the SAW devices [ 20 ].…”

Section: Resultsmentioning

confidence: 99%

Effects of AlN Coating Layer on High Temperature Characteristics of Langasite SAW Sensors

Shu

Peng

Cui

et al. 2016

Sensors

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High temperature characteristics of langasite surface acoustic wave (SAW) devices coated with an AlN thin film have been investigated in this work. The AlN films were deposited on the prepared SAW devices by mid-frequency magnetron sputtering. The SAW devices coated with AlN films were measured from room temperature to 600 °C. The results show that the SAW devices can work up to 600 °C. The AlN coating layer can protect and improve the performance of the SAW devices at high temperature. The SAW velocity increases with increasing AlN coating layer thickness. The temperature coefficients of frequency (TCF) of the prepared SAW devices decrease with increasing thickness of AlN coating layers, while the electromechanical coupling coefficient (K2) of the SAW devices increases with increasing AlN film thickness. The K2 of the SAW devices increases by about 20% from room temperature to 600 °C. The results suggest that AlN coating layer can not only protect the SAW devices from environmental contamination, but also improve the K2 of the SAW devices.

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Section: Resultsmentioning

confidence: 99%

Effects of AlN Coating Layer on High Temperature Characteristics of Langasite SAW Sensors

Shu

Peng

Cui

et al. 2016

Sensors

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“…The structure of a bulk mode resonators is typically simple to reduce the effects of spurious modes and is usually based on a beam, square or circular plate, or a ring. Any of surface acoustic wave [ 276 , 277 , 278 ], thickness shear [ 279 , 280 ], bulk acoustic wave [ 281 , 282 ], or extensional modes [ 283 , 284 ] can be selected for mass sensing among several other modes of vibration [ 283 ]. The selection of the mode shape is usually influenced by fabrication capabilities and the desired transduction mechanisms.…”

Section: Applicationsmentioning

confidence: 99%

Micromachined Resonators: A Review

et al. 2016

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This paper is a review of the remarkable progress that has been made during the past few decades in design, modeling, and fabrication of micromachined resonators. Although micro-resonators have come a long way since their early days of development, they are yet to fulfill the rightful vision of their pervasive use across a wide variety of applications. This is partially due to the complexities associated with the physics that limit their performance, the intricacies involved in the processes that are used in their manufacturing, and the trade-offs in using different transduction mechanisms for their implementation. This work is intended to offer a brief introduction to all such details with references to the most influential contributions in the field for those interested in a deeper understanding of the material.

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“…From the simulation results as shown in Fig.3 Generally, the resonance frequency of a SAW resonator would be decreased if a layer of materials deposited on the IDTs and the substrate due to the mass effect [2]. However, we can find the deposition of AlN film on the SAW device increases the resonance frequency of the SAW resonator.…”

Section: Introductionmentioning

confidence: 90%

“…The SAW sensors have been developed to measure torque [1], mass [2], strain [3] and temperature [4].…”

Section: Introductionmentioning

confidence: 99%