A ΣΔ Closed-Loop Interface for a MEMS Accelerometer with Digital Built-In Self-Test Function

Chen, Dongliang; Liu, Xiaowei; Yin, Liang; Wang, Yinhang; Shi, Zhaohe; Zhang, Guorui

doi:10.3390/mi9090444

Cited by 8 publications

(5 citation statements)

References 50 publications

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“…Driven by the demand for high-reliability applications, the BIST (built-in self-test) technology of the MEMS device has developed rapidly [ 11 , 12 ]. The BIST of MEMS accelerometers and MEMS pressure sensors are relatively mature [ 13 , 14 , 15 , 16 , 17 ]. A typical MEMS accelerometer BIST applies a known electrostatic force on the MEMS structure, and then measures the output signal to determine whether or not the device is working properly.…”

Section: Introductionmentioning

confidence: 99%

Real-Time Built-In Self-Test of MEMS Gyroscope Based on Quadrature Error Signal

Feng

Wang

Qiao³

et al. 2021

Micromachines

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In high-reliability applications, the health condition of the MEMS gyroscope needs to be known in real time to ensure that the system does not fail due to the wrong output signal. Because the MEMS gyroscope self-test based on the principle of electrostatic force cannot be performed during the working state. We propose that by monitoring the quadrature error signal of the MEMS gyroscope in real time, an online self-test of the MEMS gyroscope can be realized. The correlation between the gyroscope’s quadrature error amplitude signal and the gyroscope scale factor and bias was theoretically analyzed. Based on the sixteen-sided cobweb-like MEMS gyroscope, the real-time built-in self-test (BIST) method of the MEMS gyroscope based on the quadrature error signal was verified. By artificially setting the control signal of the gyroscope to zero, we imitated several scenarios where the gyroscope malfunctioned. Moreover, a mechanical impact table was used to impact the gyroscope. After a 6000 g shock, the gyroscope scale factor, bias, and quadrature error amplitude changed by −1.02%, −5.76%, and −3.74%, respectively, compared to before the impact. The gyroscope failed after a 10,000 g impact, and the quadrature error amplitude changed −99.82% compared to before the impact. The experimental results show that, when the amplitude of the quadrature error signal seriously deviates from the original value, it can be determined that the gyroscope output signal is invalid.

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Section: Introductionmentioning

confidence: 99%

Real-Time Built-In Self-Test of MEMS Gyroscope Based on Quadrature Error Signal

Feng

Wang

Qiao³

et al. 2021

Micromachines

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“…MEMS capacitive accelerometers have two working modes: open-loop and closed-loop. The structure of a microaccelerometer with open-loop output is simple, but the signal bandwidth is limited by the sensitive element structure and the signal input range is greatly reduced [10][11][12][13]. Closed-loop accelerometers are applied by electrostatic servo control, which can improve the linearity to a great extent.…”

Section: Introductionmentioning

confidence: 99%

Research on High-Resolution Miniaturized MEMS Accelerometer Interface ASIC

Zheng

Kong

et al. 2020

Sensors

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High-precision microelectromechanical system (MEMS) accelerometers have wide application in the military and civil fields. The closed-loop microaccelerometer interface circuit with switched capacitor topology has a high signal-to-noise ratio, wide bandwidth, good linearity, and easy implementation in complementary metal oxide semiconductor (CMOS) process. Aiming at the urgent need for high-precision MEMS accelerometers in geophones, we carried out relevant research on high-performance closed-loop application specific integrated circuit (ASIC) chips. According to the characteristics of the performance parameters and output signal of MEMS accelerometers used in geophones, a high-precision closed-loop interface ASIC chip based on electrostatic time-multiplexing feedback technology and proportion integration differentiation (PID) feedback control technology was designed and implemented. The interface circuit consisted of a low-noise charge-sensitive amplifier (CSA), a sampling and holding circuit, and a PID feedback circuit. We analyzed and optimized the noise characteristics of the interface circuit and used a capacitance compensation array method to eliminate misalignment of the sensitive element. The correlated double sampling (CDS) technology was used to eliminate low-frequency noise and offset of the interface circuit. The layout design and engineering batch chip were fabricated by a standard 0.35 μm CMOS process. The active area of the chip was 3.2 mm × 3 mm. We tested the performance of the accelerometer system with the following conditions: power dissipation of 7.7 mW with a 5 V power supply and noise density less than 0.5 μg/Hz1/2. The accelerometers had a sensitivity of 1.2 V/g and an input range of ±1.2 g. The nonlinearity was 0.15%, and the bias instability was about 50 μg.

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“…Together with the transducers, the important functional blocks of micromechanical accelerometers are primary signal processing devices, which vastly determine characteristics of the sensory microsystems for motion parameters registration [14][15][16][17][18][19]. In capacitive accelerometers, the relative simplicity of a transducer's construction and technology requires relatively complex signal processing devices for accurate measuring the nanoscopic changes of the proof mass position in capacitive transducers.…”

Section: Introductionmentioning

confidence: 99%

Highly Sensitive Signal Processing Devices for Capacitive Transducers of Micromechanical Accelerometers

et al. 2019

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In this paper, the principles of the open-loop frequency-based signal processing devices for capacitive MEMS accelerometers are used to develop three CMOS IP-core (Intellectual Property core) projects of highly sensitive signal processing devices with frequency output. Signal processing devices designed in accordance with the considered method form an output of rectangular pulses whose frequencies equal a difference of signal frequencies from two identical generators with micromechanical accelerometer capacitive transducers in their frequency control circuits. First, the analog project scheme uses two harmonic LC oscillators and an analog mixer to form an output rectangular-shape differential-frequency signal, the frequency of which is dependent on the measured acceleration. Second, the digital project is fully scalable for various CMOS-technologies due to oscillators of rectangular pulses and a digital mixer. Third, the mixed-signal project combines the advantages of the analog and digital projects. The signal processing device projects were developed, modeled and compared to comprehensively solve the problems of increasing sensitivity, dynamic range, noise immunity and resistance to destabilizing factors (e.g., to temperature changes).

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A ΣΔ Closed-Loop Interface for a MEMS Accelerometer with Digital Built-In Self-Test Function

Cited by 8 publications

References 50 publications

Real-Time Built-In Self-Test of MEMS Gyroscope Based on Quadrature Error Signal

Real-Time Built-In Self-Test of MEMS Gyroscope Based on Quadrature Error Signal

Research on High-Resolution Miniaturized MEMS Accelerometer Interface ASIC

Highly Sensitive Signal Processing Devices for Capacitive Transducers of Micromechanical Accelerometers

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