Abatement of fluorinated compounds in thermal plasma flow

Chen, Shiaw-Huei; Živný, Oldřich; Mašláni, A.; Chau, Shiu‐Wu

doi:10.1016/j.jfluchem.2018.10.004

Cited by 32 publications

(12 citation statements)

References 25 publications

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“…An excellent example is nitrogen trifluoride (NF 3 ) which, after decomposition in plasma, releases highly reactive fluorine radicals and ionized fluorine compounds that react with Si or SiO 2 , thus removing it from the wafer. The resulting compounds are removed from the process chamber by a pumping system and, due to their toxicity, are then decomposed to environmentally safe products in a plasma-assisted gas abatement process [19].…”

Section: A Chemical Vapor Depositionmentioning

confidence: 99%

High Performance Power Supplies for Plasma Materials Processing

2021

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Integrated circuits, flat panel displays, solar panels, architectural glass, high resolution camera and many other products are landmarks of the 21 st century. All of these different everyday objects have one thing in common -they are manufactured using plasma processing techniques. The aim of this paper is to introduce this silent hero of modern industry, to a broader audience. An evaluation is made of common types of power converters within the scope of plasma processing applications, while the key requirements and future challenges for such power supplies are discussed.INDEX TERMS Plasma applications, plasma materials processing, power conversion, power electronics.

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Section: A Chemical Vapor Depositionmentioning

confidence: 99%

High Performance Power Supplies for Plasma Materials Processing

2021

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“…where A p is the surface area of the particle, p ox is the partial pressure of oxidant species in the gas, and R is the kinetic rate, as shown in Eq. (17).…”

Section: -Particle Descriptionmentioning

confidence: 99%

“…The thermal plasma technique provides a region of high temperature, of over several thousand Kelvin, to enable SF 6 pyrolysis [14]. It also provides advantages such as a rapid reaction time and the presence of abundant reactive species [15][16][17].…”

Section: Introductionmentioning

confidence: 99%

Numerical Simulation of Cement Kiln Combined with Thermal Plasma for SF₆ Pyrolysis

Ko¹,

Kim²,

Choi³

2019

ASCT

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Although SF 6 gas has been used as insulation in electric power and transmission equipment, it is a very harmful greenhouse gas. SF 6 can be injected inside the cement kiln, for pyrolysis and safe conversion, during cement production. As the temperature distribution inside a kiln is not uniform, the pyrolysis and conversion efficiency of SF 6 are low. In this study, a kiln reactor combined with thermal plasma torches was applied to develop a high pyrolysis rate for SF 6. A numerical analysis was conducted to investigate the variation of heat flow that thermal plasma causes inside the cement kiln. The simulations were conducted for kilns that did and did not include a thermal plasma torch. The results showed that the average temperature inside the kiln with thermal plasma was relatively low due to the gas-mixing effect of the latter; however, the peripheral temperature was stabilized. In addition, the temperature of the near kiln inlet increased. As a result, it is expected that the internal temperature of a kiln combined with thermal plasma technology will become uniform due to the gas-mixing effect of thermal plasma, and the SF 6 pyrolysis efficiency will increase as the temperature of the local region rises.

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“…Among the many methods used for the decomposition of CF 4 , hydrolytic catalytic decomposition may be the best choice, due to the simple techniques required and the generation of harmless terminal products. [9][10][11][12] In 1999, Takita et al first reported the catalytic hydrolytic decomposition of CF 4 over AlPO 4 -based catalysts. 13,14 They observed a stable decomposition rate of 52% using Ce-AlPO 4 catalysts with a reaction time of 100 h at 700 °C and noticed the effects of the concentration of hydroxyl groups on the catalyst surface on CF 4 decomposition.…”

Section: Introductionmentioning

confidence: 99%

Identification of the active site during CF₄ hydrolytic decomposition over γ-Al₂O₃

Zhang

Tao

chen

et al. 2022

Environ. Sci.: Nano

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Abatement of fluorinated compounds in thermal plasma flow

Cited by 32 publications

References 25 publications

High Performance Power Supplies for Plasma Materials Processing

High Performance Power Supplies for Plasma Materials Processing

Numerical Simulation of Cement Kiln Combined with Thermal Plasma for SF₆ Pyrolysis

Identification of the active site during CF₄ hydrolytic decomposition over γ-Al₂O₃

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Abatement of fluorinated compounds in thermal plasma flow

Cited by 32 publications

References 25 publications

High Performance Power Supplies for Plasma Materials Processing

High Performance Power Supplies for Plasma Materials Processing

Numerical Simulation of Cement Kiln Combined with Thermal Plasma for SF6 Pyrolysis

Identification of the active site during CF4 hydrolytic decomposition over γ-Al2O3

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Product

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Numerical Simulation of Cement Kiln Combined with Thermal Plasma for SF₆ Pyrolysis

Identification of the active site during CF₄ hydrolytic decomposition over γ-Al₂O₃