2015
DOI: 10.1016/j.jhazmat.2015.03.016
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Abatement of fluorinated compounds using a 2.45GHz microwave plasma torch with a reverse vortex plasma reactor

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Cited by 34 publications
(4 citation statements)
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“…In order to increase the efficiency of the SF6 decomposition, Kim et al designed a reverse vortex microwave plasma reactor [261]. For SF6 abatement, they used air as an additive gas in microwave plasma reactor along with N2/SF6 gas mixture.…”
Section: Decomposition Of Fluorinated Gasesmentioning
confidence: 99%
“…In order to increase the efficiency of the SF6 decomposition, Kim et al designed a reverse vortex microwave plasma reactor [261]. For SF6 abatement, they used air as an additive gas in microwave plasma reactor along with N2/SF6 gas mixture.…”
Section: Decomposition Of Fluorinated Gasesmentioning
confidence: 99%
“…However, this method requires harsh reaction conditions and is expensive. Other treatments, including photodegradation, electrolytic methods, plasma methods and catalytic decomposition, are also used to remove SF 6 [5][6][7]. The use of catalysts with high efficiency and selectivity is necessary to achieve ecofriendly decomposition of SF 6 [8][9][10].…”
Section: Introductionmentioning
confidence: 99%
“…The use of catalysts with high efficiency and selectivity is necessary to achieve ecofriendly decomposition of SF 6 [8][9][10]. However, the removal rate and product selectivity of SF 6 have not reached the level of industrial application. Besides, the reaction mechanism can be illustrated clearly by theoretical calculations for more efficient catalyst screening, and has been paid little attention so far [11,12].…”
Section: Introductionmentioning
confidence: 99%
“…Until now, many NTP methods have been used to degrade SF 6 gas, including corona discharge, microwave discharge, radio frequency (RF) discharge, and dielectric barrier discharge (DBD) [28][29][30][31][32][33][34]. Among these discharge methods, microwave discharge and RF discharge can degrade a relative high concentration of SF 6 and reach a high degradation rate, but the energy yield is low.…”
Section: Introductionmentioning
confidence: 99%