Abatement of perfluorocompounds with microwave plasma in atmospheric pressure environment

“…Because "liquid" mainly means aqueous liquid, some experts also call it "discharge plasma in water" or "electrohydraulic effect" [1]. As a branch in the field of discharge in liquid, microwave discharge in water is more difficult comparing with microwave discharge in gas-phase [8]. As a branch in the field of discharge in liquid, microwave discharge in water is more difficult comparing with microwave discharge in gas-phase [8].…”

Section: Introductionmentioning

confidence: 99%

Discharge Characteristics of Microwave Plasma in Ethanol Solution

Zhao¹,

Sun²,

Zhu³

et al. 2016

Contrib. Plasma Phys.

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An apparatus was designed for generating plasma in ethanol solution. The plasma was generated on the top of the electrode by applying microwave radiation of 2.45 GHz. The results showed that ignition power decreased with increasing temperature of ethanol solution. However, ignition power increased with increasing pressure and point electrode radius of curvature. Plasma and bubbles were generated periodically in the same manner. The electron temperature of the plasma increased with increasing power, while it decreased with increasing pressure.

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“…Moreover, as PFCs strongly absorb infrared rays, they are a main cause of global warming. Table shows the global warming potentials and atmospheric lifetimes of some greenhouse gases .…”

Section: Introductionmentioning

confidence: 99%

“…There are three main methods for decreasing the generation of PFCs: development of alternate materials, reuse, and decomposition. As there are currently no chemicals that can completely replace the PFCs that are indispensable in the semiconductor industry, it is essential to develop reuse or decomposition techniques for PFCs . Consequently, PFC decomposition techniques using high incineration or thermal plasmas such as torch are being developed, and PFC‐processing techniques using nonthermal plasmas such as dielectric barrier discharge (DBD) and microwave plasma are actively being researched on.…”

Section: Introductionmentioning

confidence: 99%

Development of a combined waterjet plasma scrubber for tetrafluoromethane and by‐product removal

Chun¹,

Lee²

2013

Env Prog and Sustain Energy

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Perfluorocompounds (PFCs) have been extensively used for plasma etching and chemical vapor deposition (CVD) gases for the semiconductor manufacturing processes. PFCs have significant effects on global warming, and have very long atmospheric lifetimes. Moreover, the wastewater, including fluorine, would be caused by groundwater pollution. The long‐term consumption of water containing excessive fluoride can lead to fluorosis of the teeth and bones. In this study, a waterjet gliding arc plasma system in which plasma is combined with waterjet was developed, and the optimum operating conditions for efficient CF4 destruction were investigated by enlarging the discharge region and producing a large amount of OH radicals. The CF4 decomposed by the waterjet plasma produces hydrogen fluoride (HF) and is dissolved in the waterjet. The present system in the work utilized electrocoagulation and calcium hydroxide, which is very effective for getting rid of HF from wastewater. For the experimental parameters, the waterjet flow rate and input power were used for the waterjet plasma scrubber, the initial pH and current density for the electrocoagulation process, and the reaction pH and Ca(OH)2 injection volume for the calcium hydroxide process. It was found in the parametric experiment that the total CF4 decomposition efficiency was 99.2%; the removal efficiencies of CO2 and HF, which are the by‐products in the gas, were 69.4 and 78%, respectively; and the removal efficiency of HF, which is the by‐product in the liquid, was 99.3%. © 2013 American Institute of Chemical Engineers Environ Prog, 33: 229–237, 2014

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Abatement of perfluorocompounds with microwave plasma in atmospheric pressure environment

Cited by 19 publications

References 15 publications

Development of a Plasma Waterjet Scrubber for the Reduction of PFCs

Development of a Plasma Waterjet Scrubber for the Reduction of PFCs

Discharge Characteristics of Microwave Plasma in Ethanol Solution

Development of a combined waterjet plasma scrubber for tetrafluoromethane and by‐product removal

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