2017
DOI: 10.1016/j.ultramic.2017.06.008
|View full text |Cite
|
Sign up to set email alerts
|

Aberration corrected STEM by means of diffraction gratings

Abstract: Abstract:In the past 15 years, the advent of aberration correction technology in electron microscopy has enabled materials analysis on the atomic scale. This is made possible by complex arrangements of multipole electrodes and magnetic solenoids to compensate the aberrations inherent to any focusing element of an electron microscope. Here, we describe an alternative method to correct for the spherical aberration of the objective lens in a scanning transmission electron microscopy (STEM) using a passive, nanofa… Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
1
1

Citation Types

0
10
0

Year Published

2018
2018
2021
2021

Publication Types

Select...
5
2
1

Relationship

2
6

Authors

Journals

citations
Cited by 16 publications
(10 citation statements)
references
References 47 publications
0
10
0
Order By: Relevance
“…We show in related work that atomic resolution phase measurement is possible with a higher convergence angle and aberration correction [41]. Aberrations can be corrected holographically with the grating [42].…”
Section: Discussionmentioning
confidence: 99%
“…We show in related work that atomic resolution phase measurement is possible with a higher convergence angle and aberration correction [41]. Aberrations can be corrected holographically with the grating [42].…”
Section: Discussionmentioning
confidence: 99%
“…Despite recent proposals [21], electron microscopes cannot yet be equipped with devices that are able to impart arbitrary phase distributions to electrons. An important example of progress towards achieving adaptive optics for electrons, albeit without full flexibility, is provided by the development of hardware for correcting the spherical aberration of electron lenses, most powerfully by using magnetic multipole elements to compensate for different orders of aberrations [22] and more simply by using thin film phase masks [23,24,25].…”
Section: Introductionmentioning
confidence: 99%
“…Material diffractive electron optics have the capacity to sculpt the electron matter wave arbitrarily up to nanofabrication resolution limits. The resulting hologram can impart both phase and amplitude modulation, combining significant design flexibility [1][2] with the sub-nanoscale imaging of the TEM to support a multitude of applications [3][4][5][6]. This level of control, however, requires maximizing grating output into the proper diffraction order to ensure a detectable proportion of electrons interact with the sample.…”
mentioning
confidence: 99%