“…Process parameters of fs-PLD include laser wavelength, power, and repetition rate. [6][7][8] In addition, deposition system parameters such as background gas pressure and type and substrate heat treatment can also be varied. [9][10][11][12][13][14][15][16] Among these parameters, the background gas has a significant effect on the initial properties of laser-produced plasma (LPP), which, in general, greatly impacts the quality of the resulting thin film.…”