Absolute distance measurement system with micron-grade measurement uncertainty and 24 m range using frequency scanning interferometry with compensation of environmental vibration

Lü, Cheng; Liu, Guodong; Liu, Bingguo; Chen, Fengdong; Guo, Yu

doi:10.1364/oe.24.030215

Cited by 66 publications

(26 citation statements)

References 20 publications

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“…As shown in Figure 8, the blue line denoted the results of 20 measurements, and the green line denoted the residuals. When there were noises, the mode-hopping signals and the interfering signals in our system, the statistical uncertainty of our method was 5.7 µm over 20 measurements, which was the same order as the result of Lu et al [16]. To evaluate the accuracy of our method, the coin moved 62.45 mm every time, and totally moved seven times.…”

Section: Experiments and Analysissupporting

confidence: 54%

“…In our experiments, n f was 1.4682, n air was 1.0003, L a was 20.05832 m, the SNR was 5 dB, and the ideal value of N was about 60,000. According to Equation (16), the CRLB was about 0.8 µm. Figure 10 showed the comparison of the measured root mean square error (MSEs) at eight positions with the CRLB.…”

Section: Experiments and Analysismentioning

confidence: 99%

“…However, because of the hysteresis and creep of the piezoelectric actuator (PZT), the ECL often shows tuning nonlinearity in practical situations. To eliminate the influence of the nonlinear tuning, many methods had been proposed [15][16][17][18][19].…”

Section: Introductionmentioning

confidence: 99%

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Error Correction for FSI-Based System without Cooperative Target Using an Adaptive Filtering Method and a Phase-Matching Mosaic Algorithm

Xiong

Zhang

2018

Applied Sciences

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Featured Application: Absolute distance measurement and surface profiling.Abstract: In our frequency scanning interferometry-based (FSI-based) absolute distance measurement system, a frequency sampling method is used to eliminate the influence of laser tuning nonlinearity. However, because the external cavity laser (ECL) has been used for five years, factors such as the mode hopping of the ECL and the low signal-to-noise ratio (SNR) in a non-cooperative target measurement bring new problems, including erroneous sampling points, phase jumps, and interfering signals. This article analyzes the impacts of the erroneous sampling points and interfering signals on the accuracy of measurement, and then proposes an adaptive filtering method to eliminate the influence. In addition, a phase-matching mosaic algorithm is used to eliminate the phase jump, and a segmentation mosaic algorithm is used to improve the data processing speed. The result of the simulation proves the efficiency of our method. In experiments, the measured target was located at eight different positions on a precise guide rail, and the incident angle was 12 degrees. The maximum deviation of the measured results between the FSI-based system and the He-Ne interferometer was 9.6 µm, and the maximum mean square error of our method was 2.4 µm, which approached the Cramer-Rao lower bound (CRLB) of 0.8 µm.polarization-maintaining fiber to eliminate the influence of tuning nonlinearity. This method is a common and effective method, but it creates a dispersion mismatch problem that results in target peak broadening. Fortunately, many dispersion compensation methods had been proposed and proved efficiently [20][21][22]. In our experiments without cooperate targets, we use an ECL that has been used for five years, so the SNR is low, and mode-hoping signals often occur. These bring new problems: erroneous sampling points and interfering signals. Our paper analyzes the influences of erroneous sampling points and interfering signals, and then an adaptive filtering method is proposed to eliminate the influences completely. In addition, a phase-matching mosaic algorithm and a segmentation mosaic algorithm are adopted to eliminate the phase jump and improve the data processing speed, respectively.The article is organized as follows: Section 2 reviews the principle of the FSI-based system and discusses the measurement errors caused by erroneous sampling points and interfering signals. Then, an adaptive filtering method, a phase-matching mosaic algorithm, and a segmentation mosaic algorithm are proposed to eliminate the erroneous sampling points and phase jump and reduce the data processing time. In Sections 3 and 4, the results of the simulation and experiment prove the efficiency of the methods that were proposed in Section 2. Finally, a brief conclusion is given in Section 5.

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Section: Experiments and Analysissupporting

confidence: 54%

Section: Experiments and Analysismentioning

confidence: 99%

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Error Correction for FSI-Based System without Cooperative Target Using an Adaptive Filtering Method and a Phase-Matching Mosaic Algorithm

Xiong

Zhang

2018

Applied Sciences

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“…The Doppler shift of the target was obtained by filtering the beat signal, and the measurement error was 0.15 m/s at the moving velocity of 20.58 m/s. In 2016, Lu et al [18] added a single-frequency Appl. Sci.…”

Section: Introductionmentioning

confidence: 99%

Vibration Compensation of the Frequency-Scanning-Interferometry-Based Absolute Ranging System

Zhang

Peng

et al. 2019

Applied Sciences

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The frequency-scanning-interferometry-based (FSI-based) absolute ranging technology is a type of ranging technology possessing a high precision and no ranging blind area, so it can be used for non-cooperative targets. However, due to a tiny movement of a target, the Doppler shift and the phase modulation are introduced into the beat signal which results in ranging accuracy decrease. In order to solve this problem, first the model of vibration effect is established, and then the beat signals of two adjacent scanning periods are processed to produce a signal that is immune to vibration. The proposed method is verified by the experiments, and the experimental results show that the effect of vibration compensation is better for the target with a lower vibration velocity and at a lower vibration frequency (lower than 6 Hz). When the target is subjected to a sinusoidal vibration with an amplitude of 10 μm at a frequency of 1 Hz, by using the proposed method the standard deviation is reduced from 775 to 12 μm. Moreover, in the natural environment, by using vibration compensation the standard deviation is reduced from 289 to 11 μm.

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“…1, with the aim of overcoming the problem with incremental distance measurement, quite a few principles permitting absolute distance measurement (ADM) have been proposed to determine the target distance instantaneously with a single measurement without pulling the target from the zero-datum point. Examples include the laser intensity modulation [17][18][19], light source polarization and frequency modulation [20][21][22][23][24], time-offlight measurement using light pulses [25][26][27][28], light source frequency sweeping [29][30][31][32] and multiple-wavelength interferometry [33][34][35][36]. These ADM principles based on conventional light sources have extensively been investigated to improve or replace the laser-based incremental interferometry, but their performance and functionality are not yet comparable, only being suitable for coarse distance measurement mainly for geodetic survey and large-scale manufacturing.…”

Section: Introductionmentioning

confidence: 99%

Distance Measurements Using Mode-Locked Lasers: A Review

Jang

Kim

2018

Nanomanuf Metrol

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We present a progress review on the advance of distance measurements made at KAIST by making use of mode-locked lasers as the light source to meet ever-growing industrial demands on the measurement precision and functionality. Diverse principles exploited for the progress are described in this review with focus on four attributes: first, the optical spectrum of a mode-locked laser, distinctively called the frequency comb, permits multi-wavelength interferometry to be realized for absolute distance measurement up to several meters without losing the nanometer precision of well-established laser-based phase-measuring displacement measurement. Second, the frequency comb enables spectrally resolved interferometry for absolute distance measurement to be conducted with a nanometer resolution by Fourier transform analysis of the dispersive interference data captured using a spectrometer. Third, the mode-locked laser in the time domain appears as a train of ultrashort pulses, of which the time-of-flight is measured with a picosecond resolution by control of the pulse repetition rate with reference to the radio-frequency atomic clock. Fourth, the pulse-to-pulse cross-correlation occurring in the optical frequency domain is down-converted to the radio-frequency domain to achieve femtosecond pulse timing precision by means of dual-comb interference. All these principles based on unique spectral and temporal characteristics of ultrashort mode-locked lasers are anticipated to make contributions to the advance of nanotechnology particularly in manufacturing and metrology.

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Absolute distance measurement system with micron-grade measurement uncertainty and 24 m range using frequency scanning interferometry with compensation of environmental vibration

Cited by 66 publications

References 20 publications

Error Correction for FSI-Based System without Cooperative Target Using an Adaptive Filtering Method and a Phase-Matching Mosaic Algorithm

Error Correction for FSI-Based System without Cooperative Target Using an Adaptive Filtering Method and a Phase-Matching Mosaic Algorithm

Vibration Compensation of the Frequency-Scanning-Interferometry-Based Absolute Ranging System

Distance Measurements Using Mode-Locked Lasers: A Review

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