Absolute Measurement of Surface Potential and Discharge Power Distributions for Piezoelectric Transformer-Based Plasma Reactor

Abstract

A new method for absolute measurement of surface potential distributions on a Rosen-type piezoelectric transformer (PT) was investigated using a sensing electrode proposed in this study. The sensing electrode consists of a dielectric layer having striped back electrodes arrayed in the longitudinal direction of the PT, which is basically similar to the electrode for generating a dielectric barrier discharge (DBD). An equivalent circuit was defined for each striped electrode and a constant in the circuit necessary for the estimations of the absolute surface potential distributions was determined experimentally. The absolute measurements of the surface potential distributions of the PT were performed at (1/2)λ mode vibration both with and without a potential divider (PD) connected to the secondary terminal. Surface potential distribution without the PD connected, i.e., the unloaded condition of the PT, is in good agreement with the theoretical curve of the surface potential distribution. Moreover, the surface potential distribution while the DBD appears and the discharge power distribution of the DBD generated by the PT was also determined at absolute values using the same electrode configurations.

Measurement of the electric potential distribution on piezoelectric ceramic surface

“…III. EXPERIMENTAL MEASUREMENT To measure the output voltage on the secondary electrode, Teranishi et al [2][3] calibrate the measurement device using a high impedance probe. Their method relies on the assumption that maximal voltage is reached at the edge of the transformer.…”

“…The voltage decreases at the end of the transformer (corresponding to x=12.7mm). This local potential attenuation seems to be partly due to the local influence of the connected load [2][3].…”

“…Although the method introduced in this paper still shows a high error rate, it remains relevant with regard to literature [2][3][4]. Indeed [2][3] use an impedance bridge connected to the secondary of the lab to determine the surface potential.…”

“…Indeed [2][3] use an impedance bridge connected to the secondary of the lab to determine the surface potential. This leads a significant reduction of electrical potential and disruption the geometric distribution potential, as shown in Fig.…”

“…The electronic measuring device presented here is based on K. Teranishi et al [2][3]. Its operating principle relies on a set of distributed electrodes over the transformer surface.…”